Product description
Top platform plate for WBLL / CMF Centura context.
Specifications and identifiers
supported identity
| Item type | Plate, top platform A mechanical plate used as part of a platform or structural assembly. |
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| Platform context | WBLL / CMF Centura Context appears in repeated descriptions but should be verified before compatibility claims. |
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Equipment context
- Applied Materials Centura
Applications
process chambersPVD/CVD/etch hardwarewafer-edge controlgas distribution or chamber shieldingPlatform structureCentura-related mechanical assembly
How it works
A process-chamber mechanical or consumable component shaped for a specific wafer size, chamber location, or process module.
Geometry, material, coating, cleanliness, and wafer-size compatibility can directly affect plasma behavior, particle control, and fit.
Technical guide
possible
ceramic, quartz, silicon, aluminum, stainless steel, titanium, or coated metals may be used depending on the specific component; only listed materials should be treated as confirmed
- CVD
- chemical vapor deposition
- ESC
- electrostatic chuck
- HDP-CVD
- high-density plasma chemical vapor deposition
- PVD
- physical vapor deposition
What to verify before purchase
- Confirm whether the required part is the top plate only or part of a base/top platform set.
- Verify dimensions and revision.
Confirm with the seller
- Exact tool configuration and revision compatibility are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.