Product description
Lower liner, Y2O3 coated, DPSII, for Applied Materials equipment.
Specifications and identifiers
Identifying details
| Component type | Lower liner Repeated in all provided descriptions. |
|---|
| Coating/material | Y2O3 coated Yttria coating reference appears in all descriptions. |
|---|
| Platform context | DPSII Appears in all descriptions. |
|---|
Applications
DPSII chamber rebuildsplasma chamber consumable replacementchamber wall protectionLower chamber liner replacementYttria-coated process chamber hardware
How it works
A chamber liner is a replaceable chamber component that shields chamber walls and helps manage process exposure.
Liners influence contamination control, plasma exposure, chamber cleanliness, and maintenance intervals.
Technical guide
Y2O3
Yttrium oxide coating is commonly used for plasma resistance in semiconductor chamber parts.
- DPSII
- Applied Materials DPS platform/context as written in evidence
What to verify before purchase
- Verify coating condition, dimensions, revision, and DPSII chamber configuration.
- Inspect for cracks, flaking, erosion, or contamination.
Confirm with the seller
- Exact base material and chamber variant are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.