Product description
One-piece aluminum shield for Endura II/PVD context, with 19.5 inch diameter mentioned in one description.
Specifications and identifiers
identified attributes
| Component | One-piece shield |
|---|
| Material | Aluminum |
|---|
| Tool/process context | Endura II / PVD |
|---|
| Dimension mention | 19.5 inch diameter in one description |
|---|
Equipment context
- Applied Materials Endura II
Applications
Process chamber kitsPVD/CVD/etch chamber maintenanceWafer-edge or pedestal-area hardwarePVD chamber shieldingEndura II process kit/shield replacement
How it works
A chamber or wafer-area mechanical component used near the wafer, pedestal, or plasma/process region.
Geometry, material, surface condition, and revision can affect process uniformity, particle generation, and chamber fit.
Technical guide
- ESC
- Electrostatic chuck; a wafer-holding chuck that uses electrostatic force.
What to verify before purchase
- Confirm diameter, revision, and exact chamber compatibility.
- Inspect coating/erosion and particle condition.
Confirm with the seller
- Exact revision and finish/coating are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.