0020-98696 AMAT Cover Plate Applied Materials Ion ImplantAMAT 0020-98696 COVER PLATE SOURCE, 105978AMAT 0020-98696 COVER PLATE SOURCE, 1059430020-98696 AMAT Cover Plate Applied Materials Ion Implant0020-98696 AMAT Cover Plate Applied Materials Ion Implant0020-98696 AMAT Cover Plate Applied Materials Ion Implant0020-98696 AMAT Cover Plate Applied Materials Ion Implant0020-98696 AMAT Cover Plate Applied Materials Ion Implant0020-98696 AMAT Cover Plate Applied Materials Ion Implant0020-98696 AMAT Cover Plate Applied Materials Ion Implant
Image 1 of 10

APPLIED MATERIALS 0020-98696

Source Cover Plate

Market Availability & Pricing

Part number0020-98696
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales749.99 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Source Components › Cover Plates
Source Cover Plate
APPLIED MATERIALS0020-98696Source cover plate
Product description
Cover plate, source, used in Applied Materials source / ion implant context.
Specifications and identifiers
details
Application contextSource / ion implant wording appears
Component typeCover plate
identification
Normalized item typeSource cover plate
Supported descriptionCover plate, source, used in Applied Materials source / ion implant context.
Applications
PVD/CVD/etch process chamberselectrostatic chuck assembliesdeposition shields, liners, rings, and coversSource-area mechanical cover replacementIon implant source hardware maintenance
How it works

A chamber or wafer-processing hardware component used around the wafer, chamber wall, source area, or electrostatic chuck stack.

Geometry, material, coating, and wafer size strongly affect process fit, plasma exposure, and contamination control.

Technical guide
ceramic_or_metal

Many chamber parts use ceramics, aluminum, stainless steel, quartz, or coated metals depending on plasma and chemistry exposure.

ESC

Electrostatic chuck hardware clamps or supports wafers during processing.

What to verify before purchase
  • Confirm source location and exact plate geometry.
Confirm with the seller
  • Exact machine compatibility beyond the named platform/context is not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

0020-98696 AMAT Cover Plate Applied Materials Ion Implant

0020-98696 AMAT Cover Plate Applied Materials Ion Implant

USD 759.9900

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Feb 20, 2026 16:50 UTC
End recorded: Apr 23, 2026 02:55 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 14, 2026 16:22 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-98696 COVER PLATE SOURCE, 105978

AMAT 0020-98696 COVER PLATE SOURCE, 105978

USD 1250.00

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: May 26, 2022 18:00 UTC
End recorded: Dec 7, 2024 01:19 UTC
Estimated remaining at check: 3
Estimated sold at check: 0

eBay response captured — Checked Oct 22, 2026 11:45 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-98696 COVER PLATE SOURCE, 105943

AMAT 0020-98696 COVER PLATE SOURCE, 105943

USD 1250.00

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: May 25, 2022 21:30 UTC
End recorded: Dec 7, 2024 19:11 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 22, 2026 11:44 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

Direct marketplace listings

0 matching listings.

No active-status direct listings are shown on this page.

Marketplace search uses listing titles and service keywords, with quoted phrases and -excluded terms.