AMAT Centura DPS Upper Chamber 0021-0142135680 APPLIED MATERIALS CHAMBER UPPER A-COAT M-DPS (PARTS) 0021-01421Applied Materials 0021-01421 DPS Metal Upper Chamber Body Assembly32824 APPLIED MATERIALS CHAMBER, UPPER, A-COAT, M-DPS 0021-0142114288 APPLIED MATERIALS CHAMBER, UPPER, A-COAT, M-DPS 0021-01421Applied Materials AMAT 0021-01421 Rev. 002 Chamber, Upper, A-COAT, M-DPSApplied Materials 0021-01421 DPS Metal Upper Chamber Body AssemblyApplied Materials 0021-09601, 0021-01421 DPS METAL UPPER CHAMBER AMATApplied Materials (AMAT) 0021-01421 Chamber, Upper, REV 002 Applied Materials AMAT 0021-01421 Rev. B Chamber, Upper, A-COAT, M-DPSAMAT DPS Chamber Body P/N 0021-01421, Stock #4000021-01421 DPS Metal upper chamberAMAT DPS Chamber Body P/N 0021-01421, Stock #400AMAT DPS Chamber Body P/N 0021-01421, Stock #400AMAT DPS Chamber Body P/N 0021-01421, Stock #400AMAT DPS Chamber Body P/N 0021-01421, Stock #400AMAT DPS Chamber Body P/N 0021-01421, Stock #400AMAT DPS Chamber Body P/N 0021-01421, Stock #400AMAT DPS Chamber Body P/N 0021-01421, Stock #400AMAT DPS Chamber Body P/N 0021-01421, Stock #400AMAT DPS Chamber Body P/N 0021-01421, Stock #400AMAT DPS Chamber Body P/N 0021-01421, Stock #400AMAT DPS Chamber Body P/N 0021-01421, Stock #400AMAT DPS Chamber Body P/N 0021-01421, Stock #400AMAT DPS Chamber Body P/N 0021-01421, Stock #400AMAT DPS Chamber Body P/N 0021-01421, Stock #400Applied Materials 0040-02544 / 0021-01421 UPPER CHAMBERAMAT DPS Chamber Body P/N 0021-01421, Stock #400AMAT DPS Chamber Body P/N 0021-01421, Stock #400AMAT DPS Chamber Body P/N 0021-01421, Stock #400AMAT DPS Chamber Body P/N 0021-01421, Stock #400AMAT DPS Chamber Body P/N 0021-01421, Stock #400AMAT DPS Chamber Body P/N 0021-01421, Stock #400AMAT DPS Chamber Body P/N 0021-01421, Stock #400AMAT DPS Chamber Body P/N 0021-01421, Stock #400AMAT DPS Chamber Body P/N 0021-01421AMAT DPS Chamber Body P/N 0021-01421AMAT DPS Chamber Body P/N 0021-01421Applied Materials 0021-01421 DPS Metal Upper Chamber Body (non-assembly)Applied Materials 0021-01421 DPS Metal Upper Chamber Body
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APPLIED MATERIALS 0021-01421

DPS Upper Chamber Body Assembly

Market Availability & Pricing

Part number0021-01421
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales6999 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Chamber Bodies
DPS Upper Chamber Body Assembly
APPLIED MATERIALS0021-01421upper chamber body assembly
Product description
DPS Metal Upper Chamber Body Assembly / Chamber Upper A-Coat M-DPS
Specifications and identifiers
observed identity
Component typeUpper chamber body assembly
Listings describe upper chamber/chamber upper body.
Process/tool contextDPS / M-DPS / Centura DPS
Listings place it in DPS chamber context.
Surface/coating noteA-Coat mentioned
A coating/process finish is indicated but not defined.
Equipment context
  • Applied Materials DPS / Centura DPS context
Applications
Applied Materials DPS chambersCentura DPS moduleschamber rebuildsUpper chamber body replacementDPS chamber refurbishment
How it works

An upper chamber body is a major structural chamber component that forms part of the process volume.

Chamber body fit, coating, sealing surfaces, and process history are critical for vacuum and process performance.

Technical guide
A-Coat
Coating term from listings; exact coating not confirmed.
DPS
Decoupled Plasma Source in Applied Materials chamber context.
What to verify before purchase
  • Verify coating, revision, and sealing surfaces.
  • Inspect for erosion, corrosion, and repair history.
  • Confirm DPS/M-DPS platform compatibility.
Confirm with the seller
  • Exact material/coating
  • Whether A-Coat is original or refurb process
  • Exact chamber generation

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

AMAT Centura DPS Upper Chamber 0021-01421

AMAT Centura DPS Upper Chamber 0021-01421

USD 6000.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Oct 11, 2024 05:31 UTC
End recorded: Dec 7, 2024 00:39 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 8, 2026 16:26 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
35680 APPLIED MATERIALS CHAMBER UPPER A-COAT M-DPS (PARTS) 0021-01421

35680 APPLIED MATERIALS CHAMBER UPPER A-COAT M-DPS (PARTS) 0021-01421

USD 3388.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: Aug 1, 2024 05:00 UTC
End recorded: Dec 6, 2024 22:16 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 7, 2026 16:22 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
Applied Materials 0021-01421 DPS Metal Upper Chamber Body Assembly

Applied Materials 0021-01421 DPS Metal Upper Chamber Body Assembly

USD 7500.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jun 25, 2024 00:00 UTC
End recorded: Dec 7, 2024 12:57 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 7, 2026 16:04 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
32824 APPLIED MATERIALS CHAMBER, UPPER, A-COAT, M-DPS 0021-01421

32824 APPLIED MATERIALS CHAMBER, UPPER, A-COAT, M-DPS 0021-01421

USD 2800.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: Jul 3, 2023 06:30 UTC
End recorded: Dec 7, 2024 01:32 UTC
Estimated remaining at check: 4
Estimated sold at check: 0

eBay response captured — Checked Oct 2, 2026 16:13 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
14288 APPLIED MATERIALS CHAMBER, UPPER, A-COAT, M-DPS 0021-01421

14288 APPLIED MATERIALS CHAMBER, UPPER, A-COAT, M-DPS 0021-01421

USD 6000.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: Jun 11, 2021 13:33 UTC
End recorded: Dec 6, 2024 20:24 UTC
Estimated remaining at check: 9
Estimated sold at check: 0

eBay response captured — Checked Sep 29, 2026 16:05 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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