0021-03065 / AMAT LOWER LINER 250MM THROTTLE VALVE SPHERIC / APPLIED MATERIALSAMAT 0021-03065 Lower Liner, 250mm Throttle Valve, Spherical Blade, 148534Applied Materials 0021-03065 LOWER LINER,250MM THROTTLE VALVE,SPHERIC AMATAMAT 0021-03065 Lower Liner, 250mm Throttle Valve, Spherical Blade, 141066APPLIED MATERIALS 0021-03065 SPHERICAL BLADE 250MM THROTTLE VALVE LOWER LINER16636 APPLIED MATERIALS LOWER LINER,250MM THROTTLE VALVE,SPHERIC 0021-030650021-03065 / AMAT LOWER LINER 250MM THROTTLE VALVE SPHERIC / APPLIED MATERIALS0021-03065 / AMAT LOWER LINER 250MM THROTTLE VALVE SPHERIC / APPLIED MATERIALS0021-03065 / AMAT LOWER LINER 250MM THROTTLE VALVE SPHERIC / APPLIED MATERIALSNew AMAT Applied Materials 0021-03065 Chamber Misc0021-03065 / LOWER LINER,250MM THROTTLE VALVE,SPHERIC / APPLIED MATERIALS0021-03065 / LOWER LINER,250MM THROTTLE VALVE,SPHERIC / APPLIED MATERIALSAPPLIED MATERIALS 0021-03065 LOWER LINER, 250MM THROTTLE VALVE SPHERICAL BLADEAPPLIED MATERIALS 0021-03065 LOWER LINER, 250MM THROTTLE VALVE SPHERICAL BLADE
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APPLIED MATERIALS 0021-03065

Lower Liner for 250 mm Throttle Valve Spherical Blade

Market Availability & Pricing

Part number0021-03065
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported salesNo qualifying listing found
Vacuum › Valves & Fittings › Vacuum Components
Lower Liner for 250 mm Throttle Valve Spherical Blade
APPLIED MATERIALS0021-03065throttle valve lower liner
Product description
Lower liner for a 250 mm throttle valve with spherical blade configuration.
Specifications and identifiers
identification
PositionLower liner
Valve size/context250 mm throttle valve
Blade styleSpherical blade
Applications
vacuum throttle valveschamber pressure controlsemiconductor chamber exhaust assembliesthrottle valve servicevacuum pressure control hardwarechamber exhaust component replacement
How it works

A liner is a replaceable or fitted internal component associated with a throttle valve body or blade area.

Liner geometry affects fit, sealing clearances, conductance, and contamination control in vacuum flow control assemblies.

Technical guide
throttle valve
A valve used to regulate vacuum conductance and chamber pressure.
What to verify before purchase
  • Verify lower-liner position and matching middle/upper liner set
  • Confirm valve diameter and spherical blade design
  • Inspect surface condition and coating
Confirm with the seller
  • Exact throttle valve manufacturer
  • Material/coating
  • Compatible tool model

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

0021-03065 / AMAT LOWER LINER 250MM THROTTLE VALVE SPHERIC / APPLIED MATERIALS

0021-03065 / AMAT LOWER LINER 250MM THROTTLE VALVE SPHERIC / APPLIED MATERIALS

USD 200.7200

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Sep 14, 2026 05:51 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 7, 2026 16:08 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0021-03065 Lower Liner, 250mm Throttle Valve, Spherical Blade, 148534

AMAT 0021-03065 Lower Liner, 250mm Throttle Valve, Spherical Blade, 148534

USD 350.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Feb 28, 2024 00:00 UTC
End recorded: Dec 6, 2024 17:12 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:16 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
Applied Materials 0021-03065 LOWER LINER,250MM THROTTLE VALVE,SPHERIC AMAT

Applied Materials 0021-03065 LOWER LINER,250MM THROTTLE VALVE,SPHERIC AMAT

USD 300.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Feb 16, 2024 01:30 UTC
End recorded: Dec 7, 2024 03:19 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:13 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0021-03065 Lower Liner, 250mm Throttle Valve, Spherical Blade, 141066

AMAT 0021-03065 Lower Liner, 250mm Throttle Valve, Spherical Blade, 141066

USD 350.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Dec 21, 2023 21:04 UTC
End recorded: Dec 7, 2024 03:16 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 4, 2026 16:14 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
APPLIED MATERIALS 0021-03065 SPHERICAL BLADE 250MM THROTTLE VALVE LOWER LINER

APPLIED MATERIALS 0021-03065 SPHERICAL BLADE 250MM THROTTLE VALVE LOWER LINER

USD 599.00

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Apr 27, 2022 18:30 UTC
End recorded: Dec 7, 2024 07:46 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 22, 2026 11:39 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
16636 APPLIED MATERIALS LOWER LINER,250MM THROTTLE VALVE,SPHERIC 0021-03065

16636 APPLIED MATERIALS LOWER LINER,250MM THROTTLE VALVE,SPHERIC 0021-03065

USD 235.2600

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: Dec 12, 2019 04:34 UTC
End recorded: Dec 7, 2024 08:43 UTC
Estimated remaining at check: 4
Estimated sold at check: 0

eBay response captured — Checked Oct 20, 2026 16:08 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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