0021-03066 / AMAT MIDDLE LINER 250MM THROTTLE VALVE SPHERIC / APPLIED MATERIALSApplied Materials 0021-03066 MIDDLE LINER,250MM THROTTLE VALVE,SPHERI AMAT (M)AMAT 0021-03066 Middle Liner, 250mm Throttle Valve, Spheric, 14374316637 APPLIED MATERIALS MIDDLE LINER,250MM THROTTLE VALVE,SPHERI 0021-030660021-03066 / AMAT MIDDLE LINER 250MM THROTTLE VALVE SPHERIC / APPLIED MATERIALS0021-03066 / AMAT MIDDLE LINER 250MM THROTTLE VALVE SPHERIC / APPLIED MATERIALS0021-03066 / AMAT MIDDLE LINER 250MM THROTTLE VALVE SPHERIC / APPLIED MATERIALS0021-03066 / MIDDLE LINER,250MM THROTTLE VALVE,SPHERI / APPLIED MATERIALSApplied Materials (AMAT) 0021-03066 MIDDLE T/V LINER0021-03066 / MIDDLE LINER,250MM THROTTLE VALVE,SPHERI / APPLIED MATERIALSAPPLIED MATERIALS (AMAT) 0021-03066    MIDDLE LINER,250MM THROTTLE VALVE,SPHERIAPPLIED MATERIALS (AMAT) 0021-03066    MIDDLE LINER,250MM THROTTLE VALVE,SPHERIAPPLIED MATERIALS 0021-03066 MIDDLE LINER 250MM THROTTLE VALVE, SPHERICAL BLADEAPPLIED MATERIALS 0021-03066 MIDDLE LINER 250MM THROTTLE VALVE, SPHERICAL BLADE
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APPLIED MATERIALS 0021-03066

Middle Liner for 250 mm Throttle Valve Spherical Blade

Market Availability & Pricing

Part number0021-03066
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported salesNo qualifying listing found
Vacuum › Valves & Fittings › Vacuum Components
Middle Liner for 250 mm Throttle Valve Spherical Blade
APPLIED MATERIALS0021-03066throttle valve middle liner
Product description
Middle liner for a 250 mm throttle valve with spherical blade configuration.
Specifications and identifiers
identification
PositionMiddle liner
Valve size/context250 mm throttle valve
Blade styleSpherical blade
Applications
vacuum throttle valveschamber pressure controlsemiconductor chamber exhaust assembliesthrottle valve servicevacuum pressure control hardwareliner stack replacement
How it works

A middle liner is a fitted valve/chamber component positioned within a throttle-valve liner stack.

Correct liner position and geometry are needed for proper valve fit, conductance, and process cleanliness.

Technical guide
T/V
Throttle valve.
What to verify before purchase
  • Verify middle-liner position
  • Confirm matching lower/upper liner and valve size
  • Check revision, material, and surface finish
Confirm with the seller
  • Exact throttle valve manufacturer
  • Material/coating
  • Compatible tool model

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

0021-03066 / AMAT MIDDLE LINER 250MM THROTTLE VALVE SPHERIC / APPLIED MATERIALS

0021-03066 / AMAT MIDDLE LINER 250MM THROTTLE VALVE SPHERIC / APPLIED MATERIALS

USD 336.3800

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Sep 14, 2026 10:19 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 7, 2026 16:08 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

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Applied Materials 0021-03066 MIDDLE LINER,250MM THROTTLE VALVE,SPHERI AMAT (M)

Applied Materials 0021-03066 MIDDLE LINER,250MM THROTTLE VALVE,SPHERI AMAT (M)

USD 800.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Dec 31, 2025 07:42 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 14, 2026 16:11 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0021-03066 Middle Liner, 250mm Throttle Valve, Spheric, 143743

AMAT 0021-03066 Middle Liner, 250mm Throttle Valve, Spheric, 143743

USD 795.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jan 17, 2024 18:30 UTC
End recorded: Dec 6, 2024 19:25 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:01 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
16637 APPLIED MATERIALS MIDDLE LINER,250MM THROTTLE VALVE,SPHERI 0021-03066

16637 APPLIED MATERIALS MIDDLE LINER,250MM THROTTLE VALVE,SPHERI 0021-03066

USD 766.2200

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: Dec 12, 2019 04:34 UTC
End recorded: Dec 7, 2024 08:44 UTC
Estimated remaining at check: 4
Estimated sold at check: 0

eBay response captured — Checked Oct 20, 2026 16:08 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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