Applied Materials/AMAT DPS Cathode Base Insulator PN: 0021-09511 REV: 0226670 APPLIED MATERIALS INSULATOR, CATHODE BASE, 200MM, DPS 0021-095111pcs Applied Materials AMAT 0021-09511 Quartz Base/xjkApplied Materials 0021-09511 DPS Cathode Base Insulator0021-09511 Insulator Cathode Base 200mm DPSApplied Materials/AMAT 0021-09511 DPS CATHODE BASE INSULATOR26670 APPLIED MATERIALS INSULATOR, CATHODE BASE, 200MM, DPS 0021-09511AMAT APPLIED MATERIALS 0021-09511 Insulator Cathode BaseAMAT APPLIED MATERIALS 0021-09511 Insulator Cathode BaseAMAT Applied Materials 0021-09511 DPS Insulator Cathode Base 200mm NewINSULATORCATHODE BASE200MMDPS
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APPLIED MATERIALS 0021-09511

DPS Cathode Base Insulator

Market Availability & Pricing

Part number0021-09511
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales833 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Ceramic & Quartz Parts
DPS Cathode Base Insulator
APPLIED MATERIALS0021-09511Cathode base insulator
Product description
Cathode base insulator, 200 mm DPS context, quartz/insulating material reference present
Specifications and identifiers
identification
Component formCathode base insulator
Insulating component used around a cathode/base assembly.
Process/platform contextDPS
Associated with Applied Materials DPS hardware.
Size context200 mm
Wafer/tool size context repeated in evidence.
Material referenceQuartz mentioned once
Likely insulating material, but exact material should be verified.
Revision observedRev 02
Revision matching is recommended.
Applications
DPS chamber cathode/base assembliesPlasma chamber rebuildsInsulator replacementDPS cathode/base insulator replacementPlasma chamber PM200 mm chamber rebuild
How it works

A cathode base insulator electrically isolates cathode/base hardware in a plasma chamber assembly.

Insulators protect against unintended current paths, arcing, and plasma instability; material condition matters in plasma-exposed areas.

Technical guide
quartz

High-purity insulating material often used in plasma or thermal environments, but exact material must be verified.

DPS

Decoupled Plasma Source architecture used in Applied Materials plasma tools.

What to verify before purchase
  • Confirm material, revision, and 200 mm DPS configuration.
  • Inspect for cracks, chips, surface deposits, and arcing marks.
  • Verify matching cathode/base assembly and dimensions.
Confirm with the seller
  • Exact material is not fully confirmed; quartz is mentioned but should be verified.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

Applied Materials/AMAT DPS Cathode Base Insulator PN: 0021-09511 REV: 02

Applied Materials/AMAT DPS Cathode Base Insulator PN: 0021-09511 REV: 02

USD 900.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Feb 8, 2024 20:00 UTC
End recorded: Dec 7, 2024 01:46 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:10 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

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26670 APPLIED MATERIALS INSULATOR, CATHODE BASE, 200MM, DPS 0021-09511

26670 APPLIED MATERIALS INSULATOR, CATHODE BASE, 200MM, DPS 0021-09511

USD 1742.3000

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: Jun 28, 2023 06:00 UTC
End recorded: Dec 6, 2024 22:18 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 2, 2026 16:12 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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