Product description
Plate, blocker, DXZ SACVD, Centura
Specifications and identifiers
identified attributes
| Item function | Blocker plate A chamber plate used as process/chamber hardware. |
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| Process/platform context | DXZ SACVD, Centura Supported as context for this part; exact chamber configuration should be verified. |
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| Wafer size | 200 mm Supported by some source wording; verify against drawing before use. |
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Equipment context
- Applied Materials Centura DXZ SACVD
Applications
CVD chambersetch chambersPVD chamberswafer support/shieldinggas distribution or process uniformitySACVD chamber hardwareCentura/DXZ process module servicechamber plate replacement
How it works
A chamber hardware component such as a ring, plate, shield, faceplate, or cover used in a wafer processing module.
Geometry, material, coating, wafer size, and process chamber variant are critical for fit and process performance.
Technical guide
ceramic_quartz_metal
Chamber parts may be ceramic, quartz, aluminum, graphite, stainless steel, or coated metal depending on the specific item; use only confirmed material fields for this part.
chamber_hardware
Physical process chamber hardware affects plasma exposure, gas flow, heat transfer, shielding, and wafer handling.
- ESC
- Electrostatic chuck
- SACVD
- Sub-atmospheric chemical vapor deposition
- TEOS
- Tetraethyl orthosilicate process chemistry context
- TiN
- Titanium nitride
What to verify before purchase
- Verify 200 mm/DXZ/Centura compatibility against OEM tool BOM.
- Confirm material/coating, revision, and whether the part is new/used/cleaned.
Confirm with the seller
- Exact material and coating are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.