AMAT 0021-09989 ESC Electro Static Chuck For 200mm. 120054AMAT 0021-09989 ESC Electro Static Chuck for 200mm, 110692AMAT 0021-09989 ESC Electro Static Chuck for 200mm, 110693AMAT  0021-09989 ESC Electro Static Chuck for 200mm, 110109AMAT 0021-09989 ESC Electro Static Chuck for 200mm, 110101AMAT  0021-09989 ESC Electro Static Chuck for 200mm, 110110Applied Materials (AMAT) ESC (Electro Static Chuck) P/N: 0021-09989 for 200mmApplied Materials (AMAT) 0021-09989 PEDESTAL, 200MM, NOTCH, BARRIER, HE ORINGS, Applied Materials (AMAT) ESC (Electro Static Chuck) P/N: 0021-09989 for 200mmApplied Materials (AMAT) ESC (Electro Static Chuck) P/N: 0021-09989 for 200mmApplied Materials (AMAT) ESC (Electro Static Chuck) P/N: 0021-09989 for 200mmApplied Materials (AMAT) ESC (Electro Static Chuck) P/N: 0021-09989 for 200mmApplied Materials (AMAT) ESC (Electro Static Chuck) P/N: 0021-09989 for 200mmApplied Materials (AMAT) ESC (Electro Static Chuck) P/N: 0021-09989 for 200mmApplied Materials (AMAT) ESC (Electro Static Chuck) P/N: 0021-09989 for 200mm
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APPLIED MATERIALS 0021-09989

200 mm Electrostatic Chuck

Market Availability & Pricing

Part number0021-09989
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported salesNo qualifying listing found
Mechanical › Chamber Components › Electrostatic Chucks
200 mm Electrostatic Chuck
APPLIED MATERIALS0021-09989Electrostatic chuck
Product description
200 mm ESC / electrostatic chuck for semiconductor wafer clamping.
Specifications and identifiers
supported identity
Wafer size200 mm
Repeated identity wording indicates a 200 mm chuck.
FunctionElectrostatic wafer clamping
ESCs hold wafers by electrostatic force during processing.
Alternate wordingPedestal / 200 mm notch / barrier
One reference uses pedestal wording, so verify exact assembly level.
Applications
semiconductor tool maintenancespare parts inventorymodule repair200 mm wafer processingElectrostatic wafer clampingProcess chamber pedestal service
How it works

A semiconductor equipment replacement component identified by OEM part number and short functional description.

Exact fit, revision, and configuration should be verified before installation.

What to verify before purchase
  • Verify chuck surface condition, lift-pin/notch configuration, and helium/O-ring arrangement.
  • Confirm whether the unit is the full ESC or a pedestal-level assembly.
Confirm with the seller
  • Exact chamber platform, coating, electrical connector, and helium-zone details are not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

AMAT 0021-09989 ESC Electro Static Chuck For 200mm. 120054

AMAT 0021-09989 ESC Electro Static Chuck For 200mm. 120054

USD 1200.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jun 22, 2023 17:02 UTC
End recorded: Dec 7, 2024 13:20 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 2, 2026 16:11 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0021-09989 ESC Electro Static Chuck for 200mm, 110692

AMAT 0021-09989 ESC Electro Static Chuck for 200mm, 110692

USD 1200.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Oct 13, 2022 22:30 UTC
End recorded: Dec 7, 2024 00:19 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 30, 2026 16:21 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0021-09989 ESC Electro Static Chuck for 200mm, 110693

AMAT 0021-09989 ESC Electro Static Chuck for 200mm, 110693

USD 1200.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Oct 13, 2022 22:30 UTC
End recorded: Dec 7, 2024 00:19 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 30, 2026 16:21 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT  0021-09989 ESC Electro Static Chuck for 200mm, 110109

AMAT 0021-09989 ESC Electro Static Chuck for 200mm, 110109

USD 1200.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Sep 27, 2022 17:31 UTC
End recorded: Dec 6, 2024 22:57 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 30, 2026 16:19 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0021-09989 ESC Electro Static Chuck for 200mm, 110101

AMAT 0021-09989 ESC Electro Static Chuck for 200mm, 110101

USD 1200.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Sep 27, 2022 17:31 UTC
End recorded: Dec 6, 2024 22:57 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 30, 2026 16:19 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT  0021-09989 ESC Electro Static Chuck for 200mm, 110110

AMAT 0021-09989 ESC Electro Static Chuck for 200mm, 110110

USD 1200.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Sep 27, 2022 17:30 UTC
End recorded: Dec 6, 2024 22:57 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 30, 2026 16:19 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay

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