0021-10223 / CHAMBER LINER OX-ETCH A-B / APPLIED MATERIALS AMATApplied Materials 0021-10223 LINER,CHAMBER,CLAMP LID AMAT0021-10223 / LINER CHAMBER CLAMP LID / APPLIED MATERIALS AMATAMAT 0021-10223 Liner Chamber Clamp Lid, 138995AMAT 0021-10223 LINER,CHAMBER,CLAMP LIDApplied Materials AMAT 0021-10223 Chamber Upper Liner S/N.A0030927185 APPLIED MATERIALS LINER, CHAMBER, CLAMP LID 0021-10223AMAT Applied Materials 0021-10223 Clamp Lid Chamber Liner OEM RefurbishedAMAT Applied Materials 0021-10223 Clamp Lid Chamber Liner Working SurplusApplied Materials (AMAT) 0021-10223 LINER,CHAMBER,CLAMP LIDAPPLIED MATERIALS 0021-10223 CHAMBER LINER AMAT0021-10223 / CHAMBER LINER OX-ETCH A-B / APPLIED MATERIALS AMATApplied Materials Chamber Liner AMAT 0021-10223Applied Materials Chamber Liner AMAT 0021-10223Applied Materials AMAT 0021-10223 Chamber Upper Liner S/N.A003090021-10223 / CHAMBER LINER OX-ETCH A-B / APPLIED MATERIALS AMATApplied Materials 0021-10223 LINER,CHAMBER,CLAMP LID AMAT0021-10223 Liner Chamber Clamp Lid0021-10223 CHAMBER LINER OX-ETCH A-BAPPLIED MATERIALS 0021-10223 LINER CHAMBER CLAMP LIDAPPLIED MATERIALS AMAT 0021-10223 LINER MXP CHAMBERAPPLIED MATERIALS AMAT 0021-10223 LINER MXP CHAMBERAPPLIED MATERIALS AMAT 0021-10223 LINER MXP CHAMBERAPPLIED MATERIALS AMAT 0021-10223 LINER MXP CHAMBERAMAT LINER, CHAMBER, CLAMP LID 0021-10223AMAT LINER, CHAMBER, CLAMP LID 0021-10223AMAT LINER, CHAMBER, CLAMP LID 0021-10223AMAT LINER, CHAMBER, CLAMP LID 0021-10223Applied Materials AMAT 0021-10223 Chamber Upper Liner
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Applied Materials 0021-10223

Chamber Liner / Clamp Lid Liner

Market Availability & Pricing

Part number0021-10223
ManufacturerApplied Materials
Current availabilitySee listings below
Latest completed listing with reported sales2500 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Chamber Liners
Chamber Liner / Clamp Lid Liner
Applied Materials0021-10223chamber liner
Product description
Chamber Liner, Clamp Lid / OX-Etch A-B
Specifications and identifiers
provided listing evidence
ComponentChamber liner / liner chamber clamp lid
Titles identify the component as a chamber liner.
Process contextOX-Etch A-B appears in one title
Possible etch/chamber context; verify before assigning exact tool compatibility.
Lid/clamp contextClamp lid appears repeatedly
May relate to lid/chamber liner hardware.
Applications
wafer handlingprocess chamberschamber kitsCMP or etch consumableslift mechanismsChamber liner replacementEtch chamber consumable or hardware
How it works

A mechanical chamber, wafer-handling, lift, or support component used inside or near a semiconductor processing module.

Dimensions, material, surface finish, and chamber compatibility are critical for fit and process contamination control.

Technical guide
CVD
Chemical vapor deposition.
PVD
Physical vapor deposition.
assy
Assembly.
What to verify before purchase
  • Exact revision and part-number suffix on the physical label
  • Connector, cable length, and interface compatibility with the target tool
  • Condition, completeness, and whether any accessories, sensors, or modules are included
Confirm with the seller
  • Exact OEM datasheet specifications
  • Guaranteed machine compatibility beyond listing-title evidence
  • Condition, calibration, or refurbishment status unless supplied by the seller

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

0021-10223 / CHAMBER LINER OX-ETCH A-B / APPLIED MATERIALS AMAT

0021-10223 / CHAMBER LINER OX-ETCH A-B / APPLIED MATERIALS AMAT

USD 2250.5600

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Oct 21, 2025 20:22 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 13, 2026 16:17 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
Applied Materials 0021-10223 LINER,CHAMBER,CLAMP LID AMAT

Applied Materials 0021-10223 LINER,CHAMBER,CLAMP LID AMAT

USD 1000.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Apr 25, 2025 01:14 UTC
Estimated remaining at check: 23
Estimated sold at check: 0

eBay response captured — Checked Oct 12, 2026 16:02 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
0021-10223 / LINER CHAMBER CLAMP LID / APPLIED MATERIALS AMAT

0021-10223 / LINER CHAMBER CLAMP LID / APPLIED MATERIALS AMAT

USD 3000.5600

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Aug 14, 2024 15:30 UTC
End recorded: Dec 7, 2024 03:21 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 7, 2026 16:26 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0021-10223 Liner Chamber Clamp Lid, 138995

AMAT 0021-10223 Liner Chamber Clamp Lid, 138995

USD 1600.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Dec 7, 2023 20:30 UTC
End recorded: Dec 7, 2024 04:11 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 4, 2026 16:08 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0021-10223 LINER,CHAMBER,CLAMP LID

AMAT 0021-10223 LINER,CHAMBER,CLAMP LID

USD 3500.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: NEW
Listed: Jul 26, 2023 07:00 UTC
End recorded: Dec 7, 2024 02:13 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 2, 2026 16:17 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
Applied Materials AMAT 0021-10223 Chamber Upper Liner S/N.A00309

Applied Materials AMAT 0021-10223 Chamber Upper Liner S/N.A00309

USD 2600.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Jun 12, 2023 06:30 UTC
End recorded: Dec 7, 2024 03:23 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 2, 2026 16:09 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
27185 APPLIED MATERIALS LINER, CHAMBER, CLAMP LID 0021-10223

27185 APPLIED MATERIALS LINER, CHAMBER, CLAMP LID 0021-10223

USD 1675.5000

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: Feb 23, 2022 07:31 UTC
End recorded: Dec 7, 2024 07:16 UTC
Estimated remaining at check: 3
Estimated sold at check: 0

eBay response captured — Checked Sep 29, 2026 16:22 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT Applied Materials 0021-10223 Clamp Lid Chamber Liner OEM Refurbished

AMAT Applied Materials 0021-10223 Clamp Lid Chamber Liner OEM Refurbished

USD 2508.2100

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Aug 4, 2021 20:01 UTC
End recorded: Dec 7, 2024 11:28 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 29, 2026 16:09 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT Applied Materials 0021-10223 Clamp Lid Chamber Liner Working Surplus

AMAT Applied Materials 0021-10223 Clamp Lid Chamber Liner Working Surplus

USD 1608.2100

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Aug 4, 2021 20:01 UTC
End recorded: Dec 7, 2024 11:28 UTC
Estimated remaining at check: 8
Estimated sold at check: 0

eBay response captured — Checked Sep 29, 2026 16:09 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
Applied Materials (AMAT) 0021-10223 LINER,CHAMBER,CLAMP LID

Applied Materials (AMAT) 0021-10223 LINER,CHAMBER,CLAMP LID

USD 2795.95

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jul 4, 2021 04:17 UTC
End recorded: Dec 7, 2024 00:26 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 21, 2026 11:52 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
APPLIED MATERIALS 0021-10223 CHAMBER LINER AMAT

APPLIED MATERIALS 0021-10223 CHAMBER LINER AMAT

USD 2699.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: Oct 29, 2019 16:59 UTC
End recorded: Dec 7, 2024 08:05 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 20, 2026 16:04 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
No image available

10467 APPLIED MATERIALS LINER, CHAMBER, CLAMP LID 0021-10223

USD 2195.3700

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: Apr 10, 2018 10:56 UTC
End recorded: Dec 7, 2024 03:42 UTC
Estimated remaining at check: 9
Estimated sold at check: 1

eBay response captured — Checked Oct 19, 2026 16:08 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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