0021-10693 / INSERT, SLIT VALVE / APPLIED MATERIALS AMATAMAT 0021-10693 INSERT, SLIT VALVE, 169251AMAT 0021-10693 INSERT, SLIT VALVE, 169249AMAT 0021-10693 INSERT, SLIT VALVE, 156614AMAT 0021-10693 Insert, Slit Valve, 810-06305R, 710-06305, 154773AMAT 0021-10693 Insert, Slit Valve, 150180AMAT 0021-10693 Insert, Slit Valve, 811-01997, 150181AMAT Applied Materials 0021-10693 IPS Slit Valve Insert Lot of 4 OEM RefurbishedAMAT 0021-10693 Insert, Slit Valve, 133510AMAT 0021-10693 Insert, Slit Valve, 133446AMAT 0021-10693 Insert, Slit Valve, 132119AMAT 0021-10693 Insert, Slit Valve, 127275AMAT 0021-10693 INSERT, SLIT VALVE16638 APPLIED MATERIALS INSERT, SLIT VALVE 0021-106930021-10693 / INSERT, SLIT VALVE / APPLIED MATERIALS AMAT0021-10693 / INSERT, SLIT VALVE / APPLIED MATERIALS AMAT0021-10693 / INSERT, SLIT VALVE / APPLIED MATERIALS AMATAMAT 0021-10693 Insert, Slit Valve, 13349923531 APPLIED MATERIALS INSERT, SLIT VALVE (NEW) 0021-10693APPLIED MATERIALS (AMAT) 0021-10693    INSERT, SLIT VALVE
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APPLIED MATERIALS 0021-10693

Slit Valve Insert

Market Availability & Pricing

Part number0021-10693
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported salesNo qualifying listing found
Vacuum › Valves & Fittings › Slit Valve Components
Slit Valve Insert
APPLIED MATERIALS0021-10693Slit valve insert
Product description
Insert, slit valve; Applied Materials 0021-10693.
Specifications and identifiers
identified features
Item typeSlit valve insert
Repeated descriptions identify this as an insert for a slit valve.
Related hardwareSlit valve
Used in or around a wafer-transfer valve opening.
Related numbers810-06305R / 710-06305 mentioned in some records
Treat these as cross-references to verify, not guaranteed replacement numbers.
Related parts
Applications
vacuum chamber slit valveswafer-transfer openingsloadlock or transfer-module interfacesReplacement insert for slit valve hardwareVacuum transfer-opening service component
How it works

A removable insert or liner component used with a slit valve opening in a process or transfer chamber.

Slit valve hardware helps seal or define the wafer-transfer opening; wear, coating buildup, or damage can affect sealing and particle performance.

Technical guide
insert
A replaceable fitted component that can protect or define a sealing or contact area.
slit valve
A vacuum gate used at wafer-transfer openings.
What to verify before purchase
  • Confirm exact chamber or slit-valve assembly compatibility
  • Verify insert revision, condition, and any related 810-06305R / 710-06305 cross-reference
Confirm with the seller
  • Exact tool platform is not confirmed

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

0021-10693 / INSERT, SLIT VALVE / APPLIED MATERIALS AMAT

0021-10693 / INSERT, SLIT VALVE / APPLIED MATERIALS AMAT

USD 222.3400

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Sep 18, 2026 23:20 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 12, 2026 16:08 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

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AMAT 0021-10693 INSERT, SLIT VALVE, 169251

AMAT 0021-10693 INSERT, SLIT VALVE, 169251

USD 495.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Sep 9, 2024 23:30 UTC
End recorded: Dec 7, 2024 10:52 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 8, 2026 16:07 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0021-10693 INSERT, SLIT VALVE, 169249

AMAT 0021-10693 INSERT, SLIT VALVE, 169249

USD 495.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Sep 9, 2024 23:00 UTC
End recorded: Dec 7, 2024 10:17 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 8, 2026 16:07 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0021-10693 INSERT, SLIT VALVE, 156614

AMAT 0021-10693 INSERT, SLIT VALVE, 156614

USD 495.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: May 13, 2024 22:00 UTC
End recorded: Dec 7, 2024 07:11 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 6, 2026 16:14 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0021-10693 Insert, Slit Valve, 810-06305R, 710-06305, 154773

AMAT 0021-10693 Insert, Slit Valve, 810-06305R, 710-06305, 154773

USD 495.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Apr 25, 2024 00:00 UTC
End recorded: Dec 6, 2024 20:26 UTC
Estimated remaining at check: 5
Estimated sold at check: 0

eBay response captured — Checked Oct 6, 2026 16:09 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0021-10693 Insert, Slit Valve, 150180

AMAT 0021-10693 Insert, Slit Valve, 150180

USD 495.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Mar 13, 2024 21:30 UTC
End recorded: Dec 7, 2024 04:52 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:22 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0021-10693 Insert, Slit Valve, 811-01997, 150181

AMAT 0021-10693 Insert, Slit Valve, 811-01997, 150181

USD 495.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Mar 13, 2024 21:30 UTC
End recorded: Dec 7, 2024 04:52 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:22 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT Applied Materials 0021-10693 IPS Slit Valve Insert Lot of 4 OEM Refurbished

AMAT Applied Materials 0021-10693 IPS Slit Valve Insert Lot of 4 OEM Refurbished

USD 802.2400

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Feb 14, 2024 21:00 UTC
End recorded: Dec 7, 2024 09:13 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:12 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0021-10693 Insert, Slit Valve, 133510

AMAT 0021-10693 Insert, Slit Valve, 133510

USD 495.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Oct 28, 2023 01:00 UTC
End recorded: Dec 6, 2024 20:39 UTC
Estimated remaining at check: 3
Estimated sold at check: 0

eBay response captured — Checked Oct 3, 2026 16:18 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0021-10693 Insert, Slit Valve, 133446

AMAT 0021-10693 Insert, Slit Valve, 133446

USD 495.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Oct 27, 2023 21:30 UTC
End recorded: Dec 7, 2024 06:27 UTC
Estimated remaining at check: 3
Estimated sold at check: 0

eBay response captured — Checked Oct 3, 2026 16:18 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0021-10693 Insert, Slit Valve, 132119

AMAT 0021-10693 Insert, Slit Valve, 132119

USD 495.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Oct 19, 2023 00:00 UTC
End recorded: Dec 6, 2024 21:25 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 3, 2026 16:16 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0021-10693 Insert, Slit Valve, 127275

AMAT 0021-10693 Insert, Slit Valve, 127275

USD 495.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Sep 8, 2023 17:00 UTC
End recorded: Dec 7, 2024 10:24 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 3, 2026 16:03 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0021-10693 INSERT, SLIT VALVE

AMAT 0021-10693 INSERT, SLIT VALVE

USD 300.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Jul 26, 2023 07:00 UTC
End recorded: Dec 7, 2024 02:13 UTC
Estimated remaining at check: 6
Estimated sold at check: 0

eBay response captured — Checked Oct 2, 2026 16:17 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
16638 APPLIED MATERIALS INSERT, SLIT VALVE 0021-10693

16638 APPLIED MATERIALS INSERT, SLIT VALVE 0021-10693

USD 120.9800

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: Dec 12, 2019 04:34 UTC
End recorded: Dec 7, 2024 08:44 UTC
Estimated remaining at check: 8
Estimated sold at check: 0

eBay response captured — Checked Oct 20, 2026 16:08 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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