Applied Materials 0021-11186 LINER, EXHAUST, NI PLATED, 200MM TICL4 AMATAPPLIED MATERIALS 0021-11186 REV 003 119423 LINER EXHAUST, NI PLATED TICL4APPLIED MATERIALS 0021-11186 REV 003 119423 LINER EXHAUST, NI PLATED TICL4APPLIED MATERIALS 0021-11186 REV 003 119423 LINER EXHAUST, NI PLATED TICL4APPLIED MATERIALS 0021-11186 REV 003 119423 LINER EXHAUST, NI PLATED TICL4APPLIED MATERIALS 0021-11186 REV 003 119423 LINER EXHAUST, NI PLATED TICL4APPLIED MATERIALS (AMAT) 0021-11186 LINER, EXHAUST, NI PLATED, 200MM TICL4NEW Applied Materials AMAT 0021-11186 //LINER EXHAUST,NI PLATED 200 MM SUPPLIERNEW Applied Materials AMAT 0021-11186 //LINER EXHAUST,NI PLATED 200 MM SUPPLIERNEW Applied Materials AMAT 0021-11186 //LINER EXHAUST,NI PLATED 200 MM SUPPLIERNEW Applied Materials AMAT 0021-11186 //LINER EXHAUST,NI PLATED 200 MM SUPPLIERApplied Materials 0021-11186 LINER, EXHAUST, NI PLATED, 200MM Applied Materials 0021-11186 LINER, EXHAUST, NI PLATED, 200MM Applied Materials 0021-11186 LINER, EXHAUST, NI PLATED, 200MM Applied Materials 0021-11186 LINER, EXHAUST, NI PLATED, 200MM Applied Materials 0021-11186 LINER, EXHAUST, NI PLATED, 200MM AMAT 0021-11186 LINER, EXHAUST, NI PLATED, 200MM TICL4
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APPLIED MATERIALS 0021-11186

Nickel-Plated TiCl4 Exhaust Liner

Market Availability & Pricing

Part number0021-11186
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales185 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Liners
Nickel-Plated TiCl4 Exhaust Liner
APPLIED MATERIALS0021-11186Exhaust liner
Product description
Liner, exhaust, nickel plated, 200 mm TiCl4 context
Specifications and identifiers
identification
Item typeExhaust liner
Coating/material contextNickel plated
Wafer size/context200 mm
Process chemistry contextTiCl4
revision
RevisionRev 003 mentioned
Applications
CVD/PVD process exhaust pathsTiCl4 process areas200 mm process chambersexhaust path protectionprocess chamber liner replacementTiCl4-compatible chamber hardware
How it works

An exhaust liner is a removable chamber or exhaust-path component that protects the underlying tool structure from deposits and corrosive byproducts.

Material/coating and process chemistry compatibility matter for corrosion resistance, particle control, and maintenance intervals.

Technical guide
nickel_plating

Nickel plating can improve corrosion or wear resistance in selected process environments.

TiCl4

Titanium tetrachloride, a reactive precursor/chemistry used in some semiconductor processes.

liner
A replaceable protective internal surface.
What to verify before purchase
  • Verify dimensions, revision, surface finish, coating condition, and exact process chamber compatibility.
Confirm with the seller
  • Exact tool model compatibility is not confirmed.
  • Base material under nickel plating is not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

Applied Materials 0021-11186 LINER, EXHAUST, NI PLATED, 200MM TICL4 AMAT

Applied Materials 0021-11186 LINER, EXHAUST, NI PLATED, 200MM TICL4 AMAT

USD 300.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Oct 24, 2025 06:20 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 13, 2026 16:18 UTC

Availability has not been rechecked; current availability is unknown.

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