Product description
Upper shield for 300 mm SIP TA hardware; suffix 0021-15607-001 appears in one description.
Specifications and identifiers
chamber
| Item form | Upper shield Shield component installed in the upper chamber/process area. |
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| Wafer size reference | 300 mm Repeated size reference. |
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| Process/tool reference | SIP TA Application context found in descriptions. |
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Applications
process chamber maintenancePVD/CVD/etch chamber hardwarewafer-handling or chamber interface assemblies300 mm process shield replacementSIP TA chamber service
How it works
A chamber mechanical component is a physical part used in or around a process chamber, wafer handling area, or vacuum hardware.
Dimensional fit, material compatibility, surface condition, and revision can affect process performance, vacuum integrity, and particle control.
What to verify before purchase
- Revision or suffix -001
- Shield coating and erosion
- SIP TA chamber configuration
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.