0021-20148 / HIGH CONTACT, SHIELD LOWER, 6 WAFER, 13 SOURCE / APPLIED MATERIALSAMAT 0021-20148 Shield, Lower High Conduct 6 inch wafer, 115097AMAT 0021-20148 Shield, Lower High Conduct 6 inch wafer, 114893AMAT 0021-20148 Shield, Lower High Conduct 6 inch wafer, 114894AMAT 0021-20148 Shield, Lower High Conduct 6 inch wafer, 114895AMAT 0021-20148 LOWER SHIELD, 114669AMAT 0021-20148 LOWER SHIELD, 114656AMAT 0021-20148 Shield, Lower High Conduct 6 inch wafer, 13 inch source, 114343AMAT Applied Materials 0021-20148 High Contact Lower Shield0021-20148 / HIGH CONTACT, SHIELD LOWER, 6 WAFER, 13 SOURCE / APPLIED MATERIALS0021-20148 / HIGH CONTACT, SHIELD LOWER, 6 WAFER, 13 SOURCE / APPLIED MATERIALS0021-20148 / HIGH CONTACT, SHIELD LOWER, 6 WAFER, 13 SOURCE / APPLIED MATERIALS0021-20148 / HIGH CONTACT, SHIELD LOWER, 6 WAFER, 13 SOURCE / APPLIED MATERIALS
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APPLIED MATERIALS 0021-20148

High-Conductance Lower Shield

Market Availability & Pricing

Part number0021-20148
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales665.85 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Shields & Liners
High-Conductance Lower Shield
APPLIED MATERIALS0021-20148Lower shield
Product description
Applied Materials 0021-20148 lower high-conductance shield for 6 inch wafer / 13 inch source context.
Specifications and identifiers
identification
DescriptionLower high-conductance shield
Reported wafer/source context6 inch wafer, 13 inch source
FunctionProcess chamber shielding
Applications
chamber hardwaretool mechanical assembliesservice kitsLower chamber shield replacementPVD/etch source shieldingProcess-kit maintenance
How it works

A mechanical part or assembly used for mounting, alignment, shielding, or tool hardware.

Dimensions, material, revision, and surface condition determine compatibility and reliability.

What to verify before purchase
  • Verify dimensions, material, coating, and revision
  • Inspect for erosion, deposits, cracks, or warpage
  • Confirm source/chamber compatibility
Confirm with the seller
  • Exact process chamber is not confirmed

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

0021-20148 / HIGH CONTACT, SHIELD LOWER, 6 WAFER, 13 SOURCE / APPLIED MATERIALS

0021-20148 / HIGH CONTACT, SHIELD LOWER, 6 WAFER, 13 SOURCE / APPLIED MATERIALS

USD 570.6600

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Oct 10, 2026 11:57 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 11, 2026 16:00 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

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AMAT 0021-20148 Shield, Lower High Conduct 6 inch wafer, 115097

AMAT 0021-20148 Shield, Lower High Conduct 6 inch wafer, 115097

USD 1200.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Mar 15, 2023 17:02 UTC
End recorded: Dec 7, 2024 02:06 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:18 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0021-20148 Shield, Lower High Conduct 6 inch wafer, 114893

AMAT 0021-20148 Shield, Lower High Conduct 6 inch wafer, 114893

USD 550.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Mar 9, 2023 17:02 UTC
End recorded: Dec 6, 2024 22:48 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:17 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0021-20148 Shield, Lower High Conduct 6 inch wafer, 114894

AMAT 0021-20148 Shield, Lower High Conduct 6 inch wafer, 114894

USD 550.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Mar 9, 2023 17:02 UTC
End recorded: Dec 6, 2024 22:48 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:17 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0021-20148 Shield, Lower High Conduct 6 inch wafer, 114895

AMAT 0021-20148 Shield, Lower High Conduct 6 inch wafer, 114895

USD 550.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Mar 9, 2023 17:00 UTC
End recorded: Dec 6, 2024 22:48 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:17 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0021-20148 LOWER SHIELD, 114669

AMAT 0021-20148 LOWER SHIELD, 114669

USD 1200.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Feb 23, 2023 17:00 UTC
End recorded: Dec 6, 2024 22:02 UTC
Estimated remaining at check: 5
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:15 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0021-20148 LOWER SHIELD, 114656

AMAT 0021-20148 LOWER SHIELD, 114656

USD 1250.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Feb 22, 2023 18:31 UTC
End recorded: Dec 7, 2024 08:39 UTC
Estimated remaining at check: 6
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:15 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0021-20148 Shield, Lower High Conduct 6 inch wafer, 13 inch source, 114343

AMAT 0021-20148 Shield, Lower High Conduct 6 inch wafer, 13 inch source, 114343

USD 1250.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Feb 2, 2023 23:00 UTC
End recorded: Dec 7, 2024 06:48 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:14 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT Applied Materials 0021-20148 High Contact Lower Shield

AMAT Applied Materials 0021-20148 High Contact Lower Shield

USD 350.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Apr 9, 2019 21:13 UTC
End recorded: Dec 7, 2024 05:49 UTC
Estimated remaining at check: 3
Estimated sold at check: 0

eBay response captured — Checked Oct 19, 2026 16:21 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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