Product description
Applied Materials 0021-20148 lower high-conductance shield for 6 inch wafer / 13 inch source context.
Specifications and identifiers
identification
| Description | Lower high-conductance shield |
|---|
| Reported wafer/source context | 6 inch wafer, 13 inch source |
|---|
| Function | Process chamber shielding |
|---|
Applications
chamber hardwaretool mechanical assembliesservice kitsLower chamber shield replacementPVD/etch source shieldingProcess-kit maintenance
How it works
A mechanical part or assembly used for mounting, alignment, shielding, or tool hardware.
Dimensions, material, revision, and surface condition determine compatibility and reliability.
What to verify before purchase
- Verify dimensions, material, coating, and revision
- Inspect for erosion, deposits, cracks, or warpage
- Confirm source/chamber compatibility
Confirm with the seller
- Exact process chamber is not confirmed
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.