Product description
Bushing for coil support in Electra IMP-Cu context.
Specifications and identifiers
component details
| Component | Bushing Bushing wording appears consistently. |
|---|
| Function | Coil support Identified as a coil support bushing. |
|---|
| Context | Electra IMP-Cu Supported descriptions associate it with Electra IMP-Cu. |
|---|
Applications
Process chambersWafer-handling assembliesLift mechanismsVacuum and gas-delivery modulesCoil support or isolation hardwareIMP-Cu chamber service replacement
How it works
A machined mechanical component provides alignment, support, sealing, shielding, or positioning in a semiconductor process module.
Geometry, material, coating, cleanliness, and revision can directly affect fit, vacuum integrity, and process performance.
Technical guide
common
May be aluminum, stainless steel, quartz, ceramic, polymer, or coated metal depending on service location.
What to verify before purchase
- Verify material, dimensions, coating, and whether the bushing is for a specific coil/support location.
Confirm with the seller
- Exact coil assembly and process-chamber variant are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.