Product description
Upper shield, Gamma Cu, machined
Specifications and identifiers
identity
| Component | Upper shield Repeated records identify upper shield. |
|---|
| Material | Gamma Cu / copper Cu indicates copper; exact grade/specification is not confirmed. |
|---|
| Manufacturing | Machined Repeated records mention machined. |
|---|
Applications
process chambersloadlockswafer transfer modulesshielding and linersChamber shieldingProcess area protection or plasma hardware
How it works
A machined or fabricated mechanical component used in chamber, loadlock, transfer, or process-module hardware.
Geometry, material, surface finish, cleanliness, and revision can affect fit, process results, and vacuum integrity.
What to verify before purchase
- Copper grade/coating
- Revision and clean/preclean status
- Dimensions and chamber fit
Confirm with the seller
- Exact chamber family
- Surface treatment beyond machined/precleaned wording
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.