Product description
101 floating pin pedestal with deposition dam for Applied Materials chamber hardware.
Specifications and identifiers
physical
| Component type | Floating pin pedestal |
|---|
| Configuration | 101 |
|---|
| Feature | With deposition dam |
|---|
process context
| Likely role | Wafer support or pedestal-related chamber component |
|---|
Applications
CVD chambersPVD chambersEtch chambersTransfer modulesPedestal hardware replacementWafer support/chamber kit component
How it works
A chamber mechanical component forms part of the process environment, wafer support area, or shielding/lid structure.
Geometry, material, process family, wafer size, surface finish, and cleanliness can affect fit, particles, and process results.
Technical guide
Vespel
High-performance polyimide commonly used for high-temperature and low-wear parts.
ceramic
Used where electrical insulation, heat resistance, or plasma compatibility is needed.
titanium_nitride
TiN coatings/materials are used in some chamber hardware; verify coating and material marking.
- ESC
- Electrostatic chuck.
- SNNF
- Tool or process-context abbreviation from the provided evidence; verify exact meaning.
- TXZ
- Applied Materials chamber/platform context referenced by the provided evidence.
What to verify before purchase
- Verify actual dimensions, material, coating, and deposition-dam geometry.
- Confirm exact chamber position and revision against the tool BOM.
Confirm with the seller
- Exact material and compatible chamber model are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.