Product description
Open lift hoop for 8 inch MCA E-chuck / ESC use.
Specifications and identifiers
identified features
| Function | lift hoop |
|---|
| Style | open |
|---|
| Associated assembly | 8 inch MCA E-chuck / ESC |
|---|
Applications
process chambersdegas or CVD moduleswafer-processing hardwareE-chuck lift/support hardwareChamber service and process kit hardware
How it works
A chamber hardware component is a machined, coated, or assembled part installed in or around a process chamber.
Fit, material, coating, and revision can affect plasma behavior, thermal transfer, and contamination control.
What to verify before purchase
- Verify diameter, hoop geometry, and MCA E-chuck compatibility.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.