0021-26273 / LINER CATHODE 300MM DPSII TETRA / APPLIED MATERIALS AMATAMAT 0021-26273 Cathode Liner 300MM DPSII New SealedAMAT APPLIED MATERIALS 0021-26273 300MM CATHODE LINER DPSII TETRAApplied Materials 0021-26273 LINER CATHODE SCREEN 300MM DPS IIAMAT 0021-26273 Liner Cathode Screen, 300MM DPSII Tetra, 408318AMAT 0021-26273 Liner Cathode Screen, 300MM DPSII Tetra, 4081280021-26273 / LINER CATHODE 300MM DPSII TETRA / APPLIED MATERIALS AMATApplied Materials/AMAT Liner Cathode Screen DPSII PN: 0021-26273 REV: 006Applied Materials/AMAT 0021-26273 LINER CATHODE SCREEN DPSII0021-26273 / LINER CATHODE 300MM DPSII TETRA	 / APPLIED MATERIALS AMATAMAT 0021-26273 LINER CATHODE 300MM DPSII  Tetra Applied Materials AMAT 0021-26273 Liner Cathode 300MM DPSII Tetra Applied Materials AMAT 0021-26273 Liner Cathode 300MM DPSII Tetra Applied Materials AMAT 0021-26273 Liner Cathode 300MM DPSII Tetra Applied Materials AMAT 0021-26273 Liner Cathode 300MM DPSII Tetra Applied Materials AMAT 0021-26273 Liner Cathode 300MM DPSII Tetra Applied Materials AMAT 0021-26273 Liner Cathode 300MM DPSII Tetra Applied Materials AMAT 0021-26273 Liner Cathode 300MM DPSII Tetra Applied Materials AMAT 0021-26273 Liner Cathode 300MM DPSII Tetra Applied Materials AMAT 0021-26273 Liner Cathode 300MM DPSII Tetra Applied Materials AMAT 0021-26273 Liner Cathode 300MM DPSII Tetra Applied Materials AMAT 0021-26273 Liner Cathode 300MM DPSII Tetra
Image 1 of 22

APPLIED MATERIALS 0021-26273

300 mm DPS II Tetra Cathode Liner Screen

Market Availability & Pricing

Part number0021-26273
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales2000 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Chamber Liners
300 mm DPS II Tetra Cathode Liner Screen
APPLIED MATERIALS0021-26273Cathode liner screen
Product description
300 mm DPS II/Tetra cathode liner screen or cathode liner component for Applied Materials chamber hardware.
Specifications and identifiers
identified features
Component typeCathode liner / liner screen
Process-facing cathode-area liner component.
Wafer size300 mm
Associated with 300 mm chamber hardware.
Platform/chamber contextDPS II Tetra
Chamber family context appears with the component.
Revision exampleRev 006 referenced
Revision should be verified.
Applications
300 mm plasma etch chambersDPS II/Tetra chamber cathode hardwarechamber liner replacementcathode liner replacementDPS II/Tetra chamber maintenance300 mm plasma chamber hardware service
How it works

A cathode liner or screen component used in a 300 mm DPS II/Tetra chamber context.

Cathode liners are chamber-wear and process-exposure parts; geometry, coating, and revision affect fit and process compatibility.

Technical guide
liner_material

Material is not confirmed from the provided evidence; verify coating and base material before use.

cathode_hardware

Cathode-area hardware supports plasma coupling, shielding, and chamber protection.

DPS
Decoupled plasma source terminology in Applied Materials etch context.
liner
Protective or process-facing chamber component.
What to verify before purchase
  • Verify revision, coating, and base material.
  • Confirm chamber model and wafer-size compatibility.
  • Inspect for process wear, erosion, and cleaning history.
Confirm with the seller
  • Exact material/coating and lifetime condition are not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

0021-26273 / LINER CATHODE 300MM DPSII TETRA / APPLIED MATERIALS AMAT

0021-26273 / LINER CATHODE 300MM DPSII TETRA / APPLIED MATERIALS AMAT

USD 1269.5300

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Oct 11, 2026 06:05 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 11, 2026 16:00 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0021-26273 Cathode Liner 300MM DPSII New Sealed

AMAT 0021-26273 Cathode Liner 300MM DPSII New Sealed

USD 1000.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Jul 29, 2026 18:04 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 16, 2026 16:20 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT APPLIED MATERIALS 0021-26273 300MM CATHODE LINER DPSII TETRA

AMAT APPLIED MATERIALS 0021-26273 300MM CATHODE LINER DPSII TETRA

USD 1100.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Apr 18, 2023 15:30 UTC
End recorded: Dec 6, 2024 16:51 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:22 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
Applied Materials 0021-26273 LINER CATHODE SCREEN 300MM DPS II

Applied Materials 0021-26273 LINER CATHODE SCREEN 300MM DPS II

USD 995.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jul 29, 2016 19:59 UTC
End recorded: Dec 6, 2024 23:45 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 18, 2026 16:13 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0021-26273 Liner Cathode Screen, 300MM DPSII Tetra, 408318

AMAT 0021-26273 Liner Cathode Screen, 300MM DPSII Tetra, 408318

USD 1200.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Sep 1, 2015 17:29 UTC
End recorded: Dec 6, 2024 21:39 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 18, 2026 16:02 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0021-26273 Liner Cathode Screen, 300MM DPSII Tetra, 408128

AMAT 0021-26273 Liner Cathode Screen, 300MM DPSII Tetra, 408128

USD 1200.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Sep 1, 2015 17:24 UTC
End recorded: Feb 10, 2025 00:13 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 18, 2026 16:02 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay

Direct marketplace listings

0 matching listings.

No active-status direct listings are shown on this page.

Marketplace search uses listing titles and service keywords, with quoted phrases and -excluded terms.