Product description
Screen, flat, poly etch, 300mm DPS II
Specifications and identifiers
identification
| Item type | Flat screen Process-chamber screen or plate-style component. |
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| Process context | Poly etch Poly-silicon etch context indicated by the item wording. |
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| Platform context | 300mm DPS II Applied Materials DPS II 300mm context appears repeatedly. |
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| Material/context | AN AL appears once May indicate anodized aluminum; verify material/coating. |
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Equipment context
- Applied Materials DPS II 300mm
Applications
300 mm DPS II etch chamberspoly etch chamber maintenanceprocess-facing chamber hardwarepoly etch chamber maintenanceDPS II chamber hardware replacementprocess kit/service part
How it works
A flat screen for an etch chamber is a process-facing plate or screen used within a chamber assembly.
Screens and process-facing parts must match material, coating, geometry, and chamber/process configuration.
Technical guide
anodized aluminum
Possible interpretation of AN AL; material must be verified from drawing or marking.
- DPS II
- Applied Materials Decoupled Plasma Source II platform/context term.
What to verify before purchase
- Verify material/coating and revision.
- Confirm DPS II 300mm chamber compatibility.
- Inspect for erosion, plasma exposure, or contamination.
Confirm with the seller
- exact material
- coating specification
- complete process kit relation
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.