0021-26565 / SHUTTER DISK / APPLIED MATERIALS AMAT27915 APPLIED MATERIALS DISK, SHUTTER, ESC, HOT AL, CENTER PIN 0021-26565AMAT APPLIED MATERIALS 0021-26565 DISK SHUTTER ESC HOT AL CENTER P0021-26565 / SHUTTER DISK / APPLIED MATERIALS AMAT0021-26565 / SHUTTER DISK / APPLIED MATERIALS AMAT0021-26565 / SHUTTER DISK / APPLIED MATERIALS AMAT0021-26565 / SHUTTER DISK / APPLIED MATERIALS AMAT0021-26565 / SHUTTER DISK / APPLIED MATERIALS AMATAPPLIED MATERIALS 0021-26565 DISK SHUTTER ESC HOT AL CENTER PIN BLUE 300MM AMAT125-0304 AMAT APPLIED 0021-26565 DISK, SHUTTER, ESC, HOT AL, CENTER PIN [ASIS]27915 APPLIED MATERIALS DISK, SHUTTER, ESC, HOT AL, CENTER PIN 0021-265650021-26565 / SHUTTER DISK / APPLIED MATERIALS AMATAPPLIED MATERIALS 0021-26565 DISK SHUTTER ESC HOT AL CENTER PIN BLUE 300MM AMAT
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APPLIED MATERIALS 0021-26565

Hot Aluminum ESC Shutter Disk

Market Availability & Pricing

Part number0021-26565
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales1111.5 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Shields & Shutters
Hot Aluminum ESC Shutter Disk
APPLIED MATERIALS0021-26565shutter disk
Product description
Shutter disk for ESC hot aluminum center-pin context
Specifications and identifiers
supported identity
Item typeShutter disk
A chamber disk/shutter component used to shield or cover process hardware.
ContextESC hot aluminum, center pin
Descriptive context appears in multiple sources.
Wafer size context300 mm appears in one title
Verify whether this applies to all revisions.
Applications
process chamber kitswafer support and lift hardwareshielding and gas distributionmechanical motion assembliesESC/chamber shutter hardwarePVD or chamber shielding serviceProcess kit component replacement
How it works

A shutter disk is a mechanical process or handling component used inside or near a semiconductor process module.

Process-kit and handling components must match dimensions, material, coating, revision, and cleanliness requirements.

Technical guide
common

These parts may use aluminum, stainless steel, ceramic, quartz, graphite, elastomers, or coated surfaces depending on process use.

process_hardware

Chamber hardware controls gas flow, shielding, spacing, wafer support, and contamination control.

CVD
Chemical vapor deposition.
ESC
Electrostatic chuck.
PVD
Physical vapor deposition.
What to verify before purchase
  • Confirm material, coating, revision, and center-pin geometry.
  • Inspect for erosion, warping, or surface contamination.
  • Match to the exact ESC/chamber configuration.
Confirm with the seller
  • Exact material grade and compatible platform are not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

0021-26565 / SHUTTER DISK / APPLIED MATERIALS AMAT

0021-26565 / SHUTTER DISK / APPLIED MATERIALS AMAT

USD 1001.0500

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Sep 24, 2026 12:10 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 17, 2026 16:15 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
27915 APPLIED MATERIALS DISK, SHUTTER, ESC, HOT AL, CENTER PIN 0021-26565

27915 APPLIED MATERIALS DISK, SHUTTER, ESC, HOT AL, CENTER PIN 0021-26565

USD 600.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: May 20, 2025 03:08 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 12, 2026 16:10 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
No image available

125-0304 AMAT APPLIED 0021-26565 DISK, SHUTTER, ESC, HOT AL, CENTER PIN, NEW

USD 1360.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Dec 2, 2019 01:43 UTC
End recorded: Dec 7, 2024 08:33 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 20, 2026 16:07 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT APPLIED MATERIALS 0021-26565 DISK SHUTTER ESC HOT AL CENTER P

AMAT APPLIED MATERIALS 0021-26565 DISK SHUTTER ESC HOT AL CENTER P

USD 799.9900

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Feb 8, 2019 19:12 UTC
End recorded: Dec 7, 2024 05:33 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 19, 2026 16:19 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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