Applied Materials 0021-35163 Rev AApplied Materials 0021-35163 Plate, Reflector0021-35163 / AMAT REFLECTOR PLATE, CHAMBER BOTTOM / APPLIED MATERIALSAMAT APPLIED MATERIALS 0021-35163 REFLECTOR PLATE CHMBR BOTTOM (2)AMAT 0021-35163 RTP Reflector Plate, CHMBR. BOTTOMAMAT 0021-35163 / REFLECTOR PLATE, CHAMBER. BOTTOM, 112884APPLIED MATERIALS AMAT 0021-35163 / REFLECTOR PLATE, CHMBR. BOTTOM, 10999118848 APPLIED MATERIALS PLATE, REFLECTOR, CHMBR BOTTOM, 23CM 0021-35163124-0304// AMAT APPLIED 0021-35163 PLATE, REFLECTOR, CHMBR BOTTOM ASISApplied Materials 0021-35163 Rev AAMAT 0021-35163 REV C, Reflector Plate Chamber Bottom *vvApplied Materials 0021-35163 Rev A  AMAT 0021-35163 REV C, Reflector Plate Chamber Bottom *rr  AMAT 0021-35163 REV C, Reflector Plate Chamber Bottom @zx0021-35163 / REFLECTOR PLATE, CHMBR. BOTTOM / APPLIED MATERIALS AMAT	0021-35163 PLATE, REFLECTOR, CHMBR BOTTOMApplied Materials AMAT 0021-35163 REV C, Reflector Plate Chamber BottomAMAT  RTP 0021-35163 REV C, Reflector Plate Chamber Bottom "NEW"Applied Materials AMAT 0021-35163 REV C, Reflector Plate Chamber BottomAMAT RTP 0021-35163 REV C, Reflector Plate Chamber Bottom0021-35163 / REFLECTOR PLATE, CHMBR. BOTTOM / APPLIED MATERIALSAMAT 0021-35163 REV C, Reflector Plate Chamber BottomAMAT 0021-35163 REV C, Reflector Plate Chamber BottomAMAT 0021-35163 REV C, Reflector Plate Chamber BottomAMAT 0021-35163 REV C, Reflector Plate Chamber BottomAMAT 0021-35163 REV C, Reflector Plate Chamber BottomAMAT 0021-35163 REV C, Reflector Plate Chamber Bottom75 AMAT 0021-35163AMAT 0021-35163 REV C, Reflector Plate Chamber BottomAMAT 0021-35163 REV C, Reflector Plate Chamber BottomAMAT 0021-35163 REV C, Reflector Plate Chamber BottomAMAT 0021-35163 REV C, Reflector Plate Chamber BottomAMAT 0021-35163 REV C, Reflector Plate Chamber BottomAMAT 0021-35163 REV C, Reflector Plate Chamber BottomAMAT 0021-35163 REV C, Reflector Plate Chamber Bottom
Image 1 of 35

APPLIED MATERIALS 0021-35163

Reflector Plate, Chamber Bottom

Market Availability & Pricing

Part number0021-35163
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales2250 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Plates & Faceplates
Reflector Plate, Chamber Bottom
APPLIED MATERIALS0021-35163chamber bottom reflector plate
Product description
Plate, Reflector, Chamber Bottom, Rev C
Specifications and identifiers
provided listing evidence
Repeated listing descriptionPlate, Reflector, Chamber Bottom, Rev C
Normalized from the recurring listing-title wording for this part.
Revision referencesC
Revision values appear in listing titles and may vary by unit.
Equipment context
  • Applied Materials RTP
Applications
process chamberswafer handlingCVD/etch/PVD modulesprocess kitsRTP chamber reflector/bottom plateThermal chamber reflector component
How it works

A mechanical chamber or wafer-handling component used for support, shielding, positioning, insulation, or process-chamber geometry.

Dimensions, material, revision, surface condition, and process compatibility are critical in wafer-contact or chamber-exposed parts.

Technical guide
electrostatic chuck

Wafer-holding chuck using electrostatic force when referenced by evidence.

process kit

Set of chamber-exposed parts that define geometry, protect hardware, or manage plasma/gas/thermal behavior.

200 mm
8-inch wafer class.
300 mm
12-inch wafer class.
ESC
Electrostatic chuck.
What to verify before purchase
  • Exact revision and any suffix on the physical label
  • Connector, mounting, and dimensional compatibility with the target tool
  • Condition, completeness, and whether accessories/modules are included
  • For chamber-exposed parts, material/surface condition and process contamination history
Confirm with the seller
  • OEM datasheet-level specifications unless explicitly shown in listing evidence
  • Guaranteed tool compatibility beyond the listed platform hints
  • Calibration, test status, or remaining service life

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

Applied Materials 0021-35163 Rev A

Applied Materials 0021-35163 Rev A

USD 9675.8200

Observed public listing price, not an accepted sale amount.

Observed active at check time
IT
Condition: Used
Listed: Sep 7, 2026 14:03 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:06 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
Applied Materials 0021-35163 Plate, Reflector

Applied Materials 0021-35163 Plate, Reflector

USD 2695.9500

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Jun 1, 2026 04:39 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 15, 2026 16:29 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
0021-35163 / AMAT REFLECTOR PLATE, CHAMBER BOTTOM / APPLIED MATERIALS

0021-35163 / AMAT REFLECTOR PLATE, CHAMBER BOTTOM / APPLIED MATERIALS

USD 3250.5600

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Nov 21, 2024 22:30 UTC
End recorded: Dec 7, 2024 08:56 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 9, 2026 16:20 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT APPLIED MATERIALS 0021-35163 REFLECTOR PLATE CHMBR BOTTOM (2)

AMAT APPLIED MATERIALS 0021-35163 REFLECTOR PLATE CHMBR BOTTOM (2)

USD 2000.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Jul 8, 2024 04:00 UTC
End recorded: Dec 6, 2024 23:16 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 7, 2026 16:11 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0021-35163 RTP Reflector Plate, CHMBR. BOTTOM

AMAT 0021-35163 RTP Reflector Plate, CHMBR. BOTTOM

USD 3000.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Jun 12, 2024 03:01 UTC
End recorded: Dec 6, 2024 21:39 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 6, 2026 16:24 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0021-35163 / REFLECTOR PLATE, CHAMBER. BOTTOM, 112884

AMAT 0021-35163 / REFLECTOR PLATE, CHAMBER. BOTTOM, 112884

USD 3000.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jan 3, 2023 17:31 UTC
End recorded: Feb 5, 2025 11:25 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:08 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
APPLIED MATERIALS AMAT 0021-35163 / REFLECTOR PLATE, CHMBR. BOTTOM, 109991

APPLIED MATERIALS AMAT 0021-35163 / REFLECTOR PLATE, CHMBR. BOTTOM, 109991

USD 3000.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Sep 21, 2022 18:00 UTC
End recorded: Dec 7, 2024 04:24 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 30, 2026 16:18 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
18848 APPLIED MATERIALS PLATE, REFLECTOR, CHMBR BOTTOM, 23CM 0021-35163

18848 APPLIED MATERIALS PLATE, REFLECTOR, CHMBR BOTTOM, 23CM 0021-35163

USD 1265.5800

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: May 29, 2020 02:51 UTC
End recorded: Dec 7, 2024 10:17 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 20, 2026 16:17 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
124-0304// AMAT APPLIED 0021-35163 PLATE, REFLECTOR, CHMBR BOTTOM ASIS

124-0304// AMAT APPLIED 0021-35163 PLATE, REFLECTOR, CHMBR BOTTOM ASIS

USD 1500.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Feb 18, 2019 02:24 UTC
End recorded: Dec 7, 2024 05:41 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 19, 2026 16:19 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay

Direct marketplace listings

0 matching listings.

No active-status direct listings are shown on this page.

Marketplace search uses listing titles and service keywords, with quoted phrases and -excluded terms.