Product description
Upper liner / upper throttle liner, IPS / EC74s context
Specifications and identifiers
supported identity
| Item type | Upper liner A chamber/throttle-area liner component. |
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| Context | Throttle upper liner / IPS Some evidence ties the item to throttle/IPS context. |
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| Kit context | Standard upper liner kit for EC74s appears in one source Treat as context to verify, not guaranteed kit contents. |
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Applications
process chamber kitswafer support and lift hardwareshielding and gas distributionmechanical motion assembliesThrottle area liner replacementChamber process kit serviceUpper liner kit service
How it works
A upper liner is a mechanical process or handling component used inside or near a semiconductor process module.
Process-kit and handling components must match dimensions, material, coating, revision, and cleanliness requirements.
Technical guide
common
These parts may use aluminum, stainless steel, ceramic, quartz, graphite, elastomers, or coated surfaces depending on process use.
process_hardware
Chamber hardware controls gas flow, shielding, spacing, wafer support, and contamination control.
- CVD
- Chemical vapor deposition.
- ESC
- Electrostatic chuck.
- PVD
- Physical vapor deposition.
What to verify before purchase
- Confirm whether this is a single liner or a kit.
- Verify material, revision, and coating/finish.
- Inspect for erosion and contamination.
Confirm with the seller
- Exact material and platform compatibility are not fully confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.