Product description
Applied Materials 0021-39971 lower liner for a throttle valve, including Rev P3 references.
Specifications and identifiers
identification
| Description | Lower throttle valve liner |
|---|
| Revision noted | Rev P3 appears on some units |
|---|
Applications
PVD/CVD chamber kitsESC and cathode stacksprocess chamber liner and shield replacementThrottle valve port liningProcess chamber vacuum path liner replacementChamber exhaust/throttle valve service
How it works
A process-facing ring, liner, shield, or ceramic/quartz chamber component used around the wafer or chamber opening.
Geometry, material, surface condition, and cleanliness affect process uniformity, plasma behavior, particle risk, and fit.
Technical guide
alumina
ceramic material used where electrical insulation and plasma compatibility are needed
aluminum
common chamber hardware material when compatible with the process
quartz
high-purity silica glass used for plasma-facing or high-temperature parts
- ESC
- electrostatic chuck
- PVD
- physical vapor deposition
What to verify before purchase
- Verify lower-position liner orientation
- Confirm revision and port geometry
- Inspect for erosion, coating, or deposits
Confirm with the seller
- Exact tool/chamber compatibility is not confirmed
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.