AMAT 0021-39972 MIDDLE THROTTLE VALVE PORT LINER, 149598AMAT 0021-39972 MIDDLE THROTTLE VALVE PORT LINER, 149599AMAT 0021-39972 MIDDLE THROTTLE VALVE PORT LINER, 1496000021-39972 / LINER,MIDDLE THROTTLE VALVE / APPLIED MATERIALSAMAT  P/N 0021-39972 Liner Module Throttle ValveAMAT 0021-39972 LINER,MIDDLE THROTTLE VALVEAMAT 0021-39972 MIDDLE THROTTLE VALVE PORT LINER, IPS, REV P4, 110434AMAT 0021-39972 MIDDLE THROTTLE VALVE PORT LINER, IPS, REV P4, 110435AMAT 0021-39972 MIDDLE THROTTLE VALVE LINER, 109862AMAT 0021-39972 MIDDLE THROTTLE VALVE PORT LINER, IPS, 109860AMAT APPLIED MATERIALS 0021-39972 MIDDLE THROTTLE VALVE LINERAMAT APPLIED MATERIALS 0021-39972 MIDDLE THROTTLE VALVE LINER
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APPLIED MATERIALS 0021-39972

Middle Throttle Valve Liner

Market Availability & Pricing

Part number0021-39972
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported salesNo qualifying listing found
Vacuum › Valves & Fittings › Throttle Valve Components
Middle Throttle Valve Liner
APPLIED MATERIALS0021-39972Throttle valve liner
Product description
Applied Materials 0021-39972 middle throttle valve port liner / middle throttle valve liner, with IPS and Rev P4 wording in some evidence.
Specifications and identifiers
identification
DescriptionMiddle throttle valve liner / port liner
Reported contextIPS
Revision noteRev P4 appears in evidence; verify physical part label
Applications
PVD/CVD chamber consumable stacksESC/focus/shadow/deposition ring setsthrottle valve and gas distribution hardwareThrottle valve port liningExhaust/throttle valve hardware replacementProcess chamber vacuum path hardware
How it works

A process-facing ring or plate used around the wafer, chuck, throttle opening, or gas-distribution area inside a semiconductor process chamber.

Geometry, material, coating, cleanliness, and revision affect fit, plasma behavior, gas flow, contamination risk, and process repeatability.

Technical guide
aluminum

Common in chamber hardware; verify coating and cleaned/refurbished status.

ceramic

Often used for plasma-facing insulation and wear resistance when supported by part markings.

quartz

High-purity silica glass used in many plasma or thermal chamber locations.

ESC
electrostatic chuck
SNNF
process/context abbreviation seen in chamber part descriptions; verify against tool documentation
What to verify before purchase
  • Verify liner position and revision
  • Confirm throttle valve module and tool fit
  • Inspect for coating wear, erosion, and deposits
Confirm with the seller
  • Exact tool/chamber compatibility is not confirmed

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

AMAT 0021-39972 MIDDLE THROTTLE VALVE PORT LINER, 149598

AMAT 0021-39972 MIDDLE THROTTLE VALVE PORT LINER, 149598

USD 695.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Mar 7, 2024 22:30 UTC
End recorded: Dec 7, 2024 02:21 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:19 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

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AMAT 0021-39972 MIDDLE THROTTLE VALVE PORT LINER, 149600

AMAT 0021-39972 MIDDLE THROTTLE VALVE PORT LINER, 149600

USD 695.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Mar 7, 2024 22:30 UTC
End recorded: Dec 7, 2024 02:20 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:19 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0021-39972 MIDDLE THROTTLE VALVE PORT LINER, 149599

AMAT 0021-39972 MIDDLE THROTTLE VALVE PORT LINER, 149599

USD 695.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Mar 7, 2024 22:30 UTC
End recorded: Dec 7, 2024 02:20 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:19 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
0021-39972 / LINER,MIDDLE THROTTLE VALVE / APPLIED MATERIALS

0021-39972 / LINER,MIDDLE THROTTLE VALVE / APPLIED MATERIALS

USD 527.1200

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Feb 16, 2024 19:30 UTC
End recorded: Dec 7, 2024 05:11 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:13 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT  P/N 0021-39972 Liner Module Throttle Valve

AMAT P/N 0021-39972 Liner Module Throttle Valve

USD 2200.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Feb 8, 2024 01:30 UTC
End recorded: Dec 6, 2024 19:11 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:10 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0021-39972 LINER,MIDDLE THROTTLE VALVE

AMAT 0021-39972 LINER,MIDDLE THROTTLE VALVE

USD 300.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Jul 26, 2023 07:00 UTC
End recorded: Dec 7, 2024 02:15 UTC
Estimated remaining at check: 3
Estimated sold at check: 0

eBay response captured — Checked Oct 2, 2026 16:17 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0021-39972 MIDDLE THROTTLE VALVE PORT LINER, IPS, REV P4, 110435

AMAT 0021-39972 MIDDLE THROTTLE VALVE PORT LINER, IPS, REV P4, 110435

USD 695.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Oct 11, 2022 20:00 UTC
End recorded: Dec 7, 2024 04:53 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 30, 2026 16:20 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0021-39972 MIDDLE THROTTLE VALVE PORT LINER, IPS, REV P4, 110434

AMAT 0021-39972 MIDDLE THROTTLE VALVE PORT LINER, IPS, REV P4, 110434

USD 695.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Oct 11, 2022 20:00 UTC
End recorded: Dec 7, 2024 04:53 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 30, 2026 16:20 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0021-39972 MIDDLE THROTTLE VALVE LINER, 109862

AMAT 0021-39972 MIDDLE THROTTLE VALVE LINER, 109862

USD 800.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Sep 15, 2022 20:00 UTC
End recorded: Dec 7, 2024 00:16 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 30, 2026 16:17 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0021-39972 MIDDLE THROTTLE VALVE PORT LINER, IPS, 109860

AMAT 0021-39972 MIDDLE THROTTLE VALVE PORT LINER, IPS, 109860

USD 695.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Sep 15, 2022 19:00 UTC
End recorded: Dec 6, 2024 18:14 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 30, 2026 16:17 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT APPLIED MATERIALS 0021-39972 MIDDLE THROTTLE VALVE LINER

AMAT APPLIED MATERIALS 0021-39972 MIDDLE THROTTLE VALVE LINER

USD 1240.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Feb 8, 2019 18:26 UTC
End recorded: Dec 7, 2024 05:33 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 19, 2026 16:18 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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