Product description
Applied Materials 0021-39972 middle throttle valve port liner / middle throttle valve liner, with IPS and Rev P4 wording in some evidence.
Specifications and identifiers
identification
| Description | Middle throttle valve liner / port liner |
|---|
| Reported context | IPS |
|---|
| Revision note | Rev P4 appears in evidence; verify physical part label |
|---|
Applications
PVD/CVD chamber consumable stacksESC/focus/shadow/deposition ring setsthrottle valve and gas distribution hardwareThrottle valve port liningExhaust/throttle valve hardware replacementProcess chamber vacuum path hardware
How it works
A process-facing ring or plate used around the wafer, chuck, throttle opening, or gas-distribution area inside a semiconductor process chamber.
Geometry, material, coating, cleanliness, and revision affect fit, plasma behavior, gas flow, contamination risk, and process repeatability.
Technical guide
aluminum
Common in chamber hardware; verify coating and cleaned/refurbished status.
ceramic
Often used for plasma-facing insulation and wear resistance when supported by part markings.
quartz
High-purity silica glass used in many plasma or thermal chamber locations.
- ESC
- electrostatic chuck
- SNNF
- process/context abbreviation seen in chamber part descriptions; verify against tool documentation
What to verify before purchase
- Verify liner position and revision
- Confirm throttle valve module and tool fit
- Inspect for coating wear, erosion, and deposits
Confirm with the seller
- Exact tool/chamber compatibility is not confirmed
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.