0021-52084 / CAPTIVE THERMAL GASKET .060 THK SICONI / APPLIED MATERIALS AMAT0021-52084 / CAPTIVE THERMAL GASKET .060 THK SICONI / APPLIED MATERIALS AMATApplied Materials AMAT 0021-52084 Captive Thermal Gasket .060" / 18.5" DiameterApplied Materials 0021-52084 Captive Thermal Gasket .060" Thick 18.5" DiameterNEW Applied Materials 0021-52084 18.5" Diameter Captive Thermal Gasket Sealed0021-52084 / CAPTIVE THERMAL GASKET .060 THK SICONI / APPLIED MATERIALS AMATNEW Applied Materials 0021-52084 18.5" Diameter Captive Thermal Gasket SealedApplied Materials 0021-52084 Captive Thermal Gasket .060" Thick 18.5" DiameterNEW Applied Materials 0021-52084 18.5" Diameter Captive Thermal Gasket SealedApplied Materials 0021-52084 Captive Thermal Gasket .060" Thick 18.5" DiameterNEW Applied Materials 0021-52084 18.5" Diameter Captive Thermal Gasket SealedApplied Materials 0021-52084 Captive Thermal Gasket .060" Thick 18.5" DiameterNEW Applied Materials 0021-52084 18.5" Diameter Captive Thermal Gasket SealedApplied Materials 0021-52084 Captive Thermal Gasket .060" Thick 18.5" DiameterNEW Applied Materials 0021-52084 18.5" Diameter Captive Thermal Gasket SealedApplied Materials 0021-52084 Captive Thermal Gasket .060" Thick 18.5" DiameterNEW Applied Materials 0021-52084 18.5" Diameter Captive Thermal Gasket SealedApplied Materials 0021-52084 Captive Thermal Gasket .060" Thick 18.5" Diameter
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APPLIED MATERIALS 0021-52084

Captive Thermal Gasket, 0.060 Thick

Market Availability & Pricing

Part number0021-52084
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales100.62 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Seals & O-Rings › Thermal Gaskets
Captive Thermal Gasket, 0.060 Thick
APPLIED MATERIALS0021-52084Thermal gasket
Product description
Captive thermal gasket, 0.060 inch thick, about 18.5 inch diameter, Siconi context, Applied Materials 0021-52084.
Specifications and identifiers
identification
Supported descriptionCaptive thermal gasket
Repeated description
Thickness0.060 inch
Repeated as .060 THK / .060 thick
Diameter18.5 inch
Repeated in several records
ContextSiconi
Appears in one detailed description
Applications
vacuum sealsgas box sealsthermal interfacesprocess chamber coversThermal sealing/interface gasket replacementSiconi chamber/service context
How it works

An O-ring or gasket seals between mating surfaces to prevent gas/vacuum leaks or control thermal contact.

Material, size, cross-section, and compression behavior determine sealing performance and chemical compatibility.

Technical guide
TFE

PTFE/Teflon-style fluoropolymer material; verify exact compound from label.

2-241
AS568 O-ring dash size
ID
inside diameter
THK
thickness
What to verify before purchase
  • Verify diameter, thickness, material, and whether gasket is captive or loose.
  • Confirm tool/chamber configuration and cleanliness/packaging.
Confirm with the seller
  • Exact material and revision are not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

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