Product description
Water input manifold for TXZ, associated with 5000/5200 SAL lid in one source.
Specifications and identifiers
supported description
| Part role | Water input manifold |
|---|
| Context | TXZ |
|---|
| Possible platform | 5000/5200 SAL lid appears in one source |
|---|
| Revision | Rev 001/04 variants appear |
|---|
Equipment context
- Applied Materials 5000/5200 TXZ/SAL lid context
Applications
gas boxesslurry or chemical deliverycooling circuitsprocess gas deliverycooling water distributionTXZ chamber/manifold service
How it works
A component used to route, regulate, filter, meter, or connect process gas, purge gas, liquid, or cooling fluid.
Gas/fluid parts must match flow path, fittings, pressure rating, material compatibility, and cleanliness requirements.
Technical guide
316 stainless steel, VCR, VCR/Vacuum fittings, elastomers
Common materials or interfaces when supported by the part description.
What to verify before purchase
- Verify revision, port layout, water fittings, and 5000/5200 compatibility.
Confirm with the seller
- Exact platform and revision vary in the source wording.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.