Product description
Slit inner door / slit liner door, Y203 context, for Applied Materials
Specifications and identifiers
supported identity
| item noun | Slit liner door / slit inner door Door/liner hardware associated with a slit opening. |
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| descriptor | Y203 Appears in one source; exact meaning not confirmed. |
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Applications
gas panelsslit valvesvacuum isolationprocess gas deliverySlit-valve or slit-opening door liner replacementChamber transfer opening hardware
How it works
A valve, valve seal, or manifold component controls or seals process gas, vacuum, cooling, or pneumatic flow paths.
Material, port size, seal chemistry, and actuator configuration are critical for leak-tight operation.
Technical guide
Chemraz/Viton
Elastomer trade names that may indicate chemical compatibility; exact compound should be verified.
VCR
High-purity face-seal fitting style often used in gas systems.
- SST
- stainless steel
- VCR
- vacuum coupling radius face-seal fitting
What to verify before purchase
- Verify exact door/liner geometry
- Confirm Y203 context if relevant
- Inspect sealing/contact surfaces
Confirm with the seller
- Exact material/coating
- Exact chamber model
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.