Product description
Seal, large face notch, Chemraz 512, for 200 mm / 8 inch pedestal sealing use
Specifications and identifiers
Seal attributes
| Seal description | Large face notch pedestal seal A shaped elastomer seal used at a pedestal sealing interface. |
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| Material/family | Chemraz 512 Perfluoroelastomer sealing material family named in the evidence. |
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| Nominal tool/wafer size | 200 mm / 8 inch Size context supported by the provided part descriptions. |
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Applications
Pedestal sealing interfacesVacuum/process chamber sealingHigh-chemical-exposure semiconductor environmentsPedestal seal replacementVacuum/process interface sealingSemiconductor chamber maintenance
How it works
A Chemraz pedestal seal is a chemically resistant elastomer seal used around chamber or pedestal interfaces.
Correct seal material, geometry, and size are critical for vacuum integrity and chemical compatibility.
Technical guide
Chemraz 512
A perfluoroelastomer-type sealing material family used where chemical resistance is important.
- large face notch
- A shaped seal geometry that should be matched visually and dimensionally.
What to verify before purchase
- Confirm Chemraz 512 material marking or packaging.
- Verify 200 mm / 8 inch pedestal fit and notch geometry.
- Check condition, compression set, contamination, and packaging integrity.
Confirm with the seller
- Exact chamber model and revision are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.