Product description
Heater, common 8 in. long shaft, AlN, HA12; 200mm ceramic heater context
Specifications and identifiers
identification
| Item type | Ceramic heater Heater component with ceramic body/insulating structure. |
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| Material context | AlN Aluminum nitride called out in the description. |
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| Size/context | 8 in. long shaft / 200mm Both descriptions appear and should be checked against drawing. |
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| Reference | HA12 Possible heater family or drawing suffix; verify on label. |
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| Resistance reference | 3.5 ohm appears in one source Treat as a value to verify rather than a confirmed complete electrical specification. |
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Applications
degas modulesCVD chambersheated pedestalswafer temperature control200 mm chamber heater replacementwafer thermal controllong-shaft heater service
How it works
An AlN ceramic heater is a heated ceramic component used for wafer or chamber temperature control.
Thermal components affect wafer temperature control and must match tool geometry, electrical characteristics, and sensor feedback requirements.
Technical guide
AlN
Aluminum nitride ceramic, valued for thermal conductivity and electrical insulation.
- AlN
- Aluminum nitride; a ceramic often used where thermal conductivity and electrical insulation are important.
- HA12
- Reference code appearing with the heater description; confirm exact meaning from part marking or drawing.
- T/C
- Thermocouple; a temperature-sensing element used for thermal feedback.
What to verify before purchase
- Verify voltage, wattage, resistance, and connector configuration.
- Confirm shaft length and heater geometry.
- Check ceramic condition for cracks or contamination.
Confirm with the seller
- complete electrical rating
- exact tool platform
- sensor integration
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.