Product description
Cover for orienter/degas chamber area, with Endura 200mm orienter chamber context.
Specifications and identifiers
identified attributes
| Component | Cover |
|---|
| Subassembly context | Orienter/degas |
|---|
| Tool context | Endura 200mm appears in descriptions |
|---|
Equipment context
- Applied Materials Endura 200mm
Applications
Process chamber kitsPVD/CVD/etch chamber maintenanceWafer-edge or pedestal-area hardwareOrienter/degas chamber cover replacementEndura mechanical chamber service
How it works
A chamber or wafer-area mechanical component used near the wafer, pedestal, or plasma/process region.
Geometry, material, surface condition, and revision can affect process uniformity, particle generation, and chamber fit.
Technical guide
- ESC
- Electrostatic chuck; a wafer-holding chuck that uses electrostatic force.
What to verify before purchase
- Confirm whether the needed item is the cover or chamber assembly.
- Verify material, mounting features, and revision.
Confirm with the seller
- Exact material and dimensions are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.