Product description
Plate, lid, TXZ, 200 mm; Applied Materials 0040-06596.
Specifications and identifiers
identification
| Part description | Plate, lid, TXZ This identifies the part as a lid plate. |
|---|
| Wafer size context | 200 mm Multiple entries include 200 mm. |
|---|
| Revision | Rev. 01 is a revision hint to verify Revision should be verified against the physical part. |
|---|
Equipment context
- Applied Materials TXZ / 200 mm module
Applications
CVD chamber hardwaregas box assemblies200 mm process moduleschamber or gas-box lid hardware200 mm CVD-related module hardware
How it works
A machined plate used as a lid, cover, or chamber/gas-box structural surface.
Lid plates set mechanical alignment and sealing geometry; small dimensional or revision differences can affect fit and process integrity.
Technical guide
metal
Lid plates are commonly machined metal unless physical item indicates ceramic, quartz, or coated construction.
- TXZ
- Applied Materials platform/module shorthand appearing with some CVD-related hardware.
What to verify before purchase
- revision number
- NDM-380 variant
- surface condition and sealing surfaces
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.