Product description
Screen, turbo, anodized
Specifications and identifiers
identification
| Part type | turbo screen Screen or shield component associated with turbo/vacuum area. |
|---|
| Finish | anodized The supplied wording consistently states anodized finish. |
|---|
Applications
chambersload lockspedestalsgas boxesrobot and wafer-handling assembliesturbo/vacuum screenprotective or flow-related screen component
How it works
A machined or formed component used for mounting, shielding, support, sealing, or gas/process hardware.
Small dimensional or material changes can affect vacuum sealing, plasma exposure, wafer clearance, or mechanical alignment.
Technical guide
aluminum
common lightweight machined tool material when stated
stainless steel
used for corrosion resistance and mechanical strength where stated
anodized
surface treatment for aluminum parts that improves wear/corrosion resistance when specified
- ASSY
- assembly
- ID
- inside diameter
- OD
- outside diameter
What to verify before purchase
- Confirm screen dimensions, anodize specification, mounting holes, and chamber compatibility.
Confirm with the seller
- Exact turbo pump/chamber location is not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.