0040-09961/ ESC, 200MM NOTCH, INCLUDES 0020-32963, 0040-09957/APPLIED MATERIALSAMAT 0040-09961(0040-09957, 0020-32963) PEDESTAL, 200MM, NOTCH (1S), NI, LIFT 2AMAT Applied Materials 0040-09957 200mm ESC Notch 0020-32963 0040-09961 WorkingAMAT 0040-09961 ESC ASSY 200MM NOTCH W/ BACKING, 111527AMAT P/N 0040-09961 Description: PDSTL ASSY 200mm FLAT, IS, NI, LIFT 3, HV CEAMAT Applied Materials 0040-99997 200mm ESC 0040-09961 Rev. B Has Wear As-IsAMAT Applied Materials 0040-09961 200mm ESC Pedestal Assembly Rev. 001 As-IsAMAT Applied Materials 0040-09961 200mm ESC Pedestal Assy Rev. 001 As-Is SpareAMAT Applied Materials 0040-09961 200mm ESC Pedestal Assembly Copper As-IsApplied Materials/AMAT Notch Pedestal 20MM PN: 0040-09961 REV: 001Applied Materials 0040-09961 Pedestal, 200mm Notch, IS, NI Lift2, HVCEN,.AMAT Applied Materials 0040-09961 200mm ESC Pedestal Assembly Rev. B Cu As-IsAMAT Applied Materials 0040-09961 200mm ESC Pedestal Assembly Rev. 001 As-IsAMAT Applied Materials 0040-09961 200mm ESC Pedestal Assy Rev. 001 As-Is SpareApplied Materials/AMAT 0040-09961 ASSY NOTCH PEDESTAL 20MMApplied Materials AMAT 0040-09957, 0040-09961, 200mm MXP ESC Assy.AMAT Applied Materials 0040-99997 200mm ESC 0040-09961 Rev. B Untested As-IsAMAT Applied Materials 0040-99997 200mm ESC 0040-09961 Rev. B Has Wear As-IsAMAT Applied Materials 0040-09961 200mm ESC  pedestal assembly Rev.BAMAT Applied Materials 0040-99997 200mm ESC 0040-09961 Rev. B Working SurplusAMAT Applied Materials 0040-09961 200mm Notch Pedestal Assembly Rev. B As-IsAMAT Applied Materials 0040-09961 200mm Notch Pedestal Assembly Rev. B As-IsAmat 0040-09957 0040-09961 (0010-10528) ESC Pedestal Assy, 200mm Poly EtchAPPLIED MATERIALS PEDESTAL 200MM ESC 0040-09961Amat 0040-09957 0040-09961 (0010-10528) ESC Pedestal Assy, 200mm Poly EtchApplied Materials Esc Polyimide Chuck/pedestal 0040-09957 / 0040-09961 /Applied Materials Esc Polyimide Chuck/pedestal 0040-09957 / 0040-09961 /Applied Materials Esc Polyimide Chuck/pedestal 0040-09957 / 0040-09961 /Applied Materials Esc Polyimide Chuck/pedestal 0040-09957 / 0040-09961 /Applied Materials Esc Polyimide Chuck/pedestal 0040-09957 / 0040-09961 /Applied Materials Esc Polyimide Chuck/pedestal 0040-09957 / 0040-09961 /Applied Materials Esc Polyimide Chuck/pedestal 0040-09957 / 0040-09961 /Applied Materials Esc Polyimide Chuck/pedestal 0040-09957 / 0040-09961 /APPLIED MATERIALS PEDESTAL 200MM ESC 0040-09961 Qty40Amat 0040-09957 0040-09961 (0010-10528) ESC Pedestal Assy, 200mm Poly EtchAPPLIED MATERIALS PEDESTAL 200MM ESC 0040-09961 Qty40Amat 0040-09957 0040-09961 (0010-10528) ESC Pedestal Assy, 200mm Poly EtchAmat 0040-09957 0040-09961 (0010-10528) ESC Pedestal Assy, 200mm Poly EtchAmat 0040-09957 0040-09961 (0010-10528) ESC Pedestal Assy, 200mm Poly EtchApplied Materials Polyimide E Chuck Part Number 0040-09961Amat 0040-09957 0040-09961 (0010-10528) ESC Pedestal Assy, 200mm Poly EtchAmat 0040-09957 0040-09961 (0010-10528) ESC Pedestal Assy, 200mm Poly EtchApplied Materials 0040-09961 Pedestal, 200mm Notch, IS, NI Lift2, HVCEN,.Applied Materials 0040-09961 Pedestal, 200mm Notch, IS, NI Lift2, HVCEN,.APPLIED MATERIALS (AMAT) 0040-09961 Pedestal, 200mm Notch, IS, NI Lift2, HVCEAPPLIED MATERIALS (AMAT) 0040-09961 Pedestal, 200mm Notch, IS, NI Lift2, HVCEApplied Materials 0040-09961 Pedestal, 200mm Notch, IS, NI Lift2, HVCEN,.AMAT P/N 0040-09961 PEDESTAL ASSEMBLY 200mm
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APPLIED MATERIALS 0040-09961

200mm ESC Pedestal Assembly

Market Availability & Pricing

Part number0040-09961
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales911.22 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Chucks & Pedestals
200mm ESC Pedestal Assembly
APPLIED MATERIALS0040-09961electrostatic chuck pedestal assembly
Product description
Pedestal / ESC Assembly, 200mm Notch, IS, NI, Lift, HVCE/HV CEN variants mentioned
Specifications and identifiers
observed identity
Wafer size200mm
Most listings identify this as a 200mm pedestal/ESC item.
Component typeESC pedestal / notch pedestal assembly
Evidence repeatedly uses ESC, pedestal, notch pedestal, and pedestal assembly wording.
Possible material/detailCopper, Ni, polyimide mentioned
Listings mention copper, Ni, and polyimide/e-chuck context, but physical material stack should be verified.
Lift configurationLift 2 or Lift 3 mentioned
Listings conflict on lift configuration, so the exact variant must be confirmed.
Revision examplesRev 001 and Rev B mentioned
Revision affects interchangeability.
Equipment context
  • Applied Materials 200mm poly etch / MXP context
Applications
etch chambersCVD/PVD process chambers200mm Applied Materials process toolsWafer support and chucking in a 200mm process chamberReplacement pedestal/ESC assembly
How it works

An electrostatic chuck or pedestal assembly supports the wafer in a process chamber and may provide clamping, thermal coupling, lift-pin integration, and electrical bias paths.

Pedestal geometry, wafer size, backside gas features, lift-pin arrangement, coatings, and electrical characteristics are critical to process performance and tool fit.

Technical guide
ESC
Electrostatic chuck.
HVCE/HVCEN
High-voltage center/electrode-style abbreviation may be implied, but exact expansion should be verified.
IS
Abbreviation appears in evidence but is not expanded with certainty.
NI
Likely nickel-related marking, but not confirmed.
PDSTL
Pedestal.
What to verify before purchase
  • Confirm exact revision and alternate part numbers 0040-09957, 0040-99997, 0020-32963, or 0010-10528 if relevant.
  • Check lift-pin count/configuration and notch orientation.
  • Inspect for coating wear, arc marks, cracks, contamination, and electrical leakage.
  • Verify whether the unit is sold as-is or working.
Confirm with the seller
  • Exact chamber/platform compatibility
  • Exact material stack
  • Whether Lift 2 and Lift 3 variants interchange

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

0040-09961/ ESC, 200MM NOTCH, INCLUDES 0020-32963, 0040-09957/APPLIED MATERIALS

0040-09961/ ESC, 200MM NOTCH, INCLUDES 0020-32963, 0040-09957/APPLIED MATERIALS

USD 1460.6200

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Aug 25, 2026 16:47 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 17, 2026 16:04 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0040-09961(0040-09957, 0020-32963) PEDESTAL, 200MM, NOTCH (1S), NI, LIFT 2

AMAT 0040-09961(0040-09957, 0020-32963) PEDESTAL, 200MM, NOTCH (1S), NI, LIFT 2

USD 700.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Jan 14, 2026 00:13 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 14, 2026 16:13 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

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AMAT Applied Materials 0040-09957 200mm ESC Notch 0020-32963 0040-09961 Working

AMAT Applied Materials 0040-09957 200mm ESC Notch 0020-32963 0040-09961 Working

USD 702.2300

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Feb 13, 2023 23:30 UTC
End recorded: Dec 7, 2024 10:20 UTC
Estimated remaining at check: 5
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:14 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0040-09961 ESC ASSY 200MM NOTCH W/ BACKING, 111527

AMAT 0040-09961 ESC ASSY 200MM NOTCH W/ BACKING, 111527

USD 1200.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Nov 16, 2022 22:30 UTC
End recorded: Dec 7, 2024 10:19 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:01 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT P/N 0040-09961 Description: PDSTL ASSY 200mm FLAT, IS, NI, LIFT 3, HV CE

AMAT P/N 0040-09961 Description: PDSTL ASSY 200mm FLAT, IS, NI, LIFT 3, HV CE

USD 700.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Nov 9, 2022 00:30 UTC
End recorded: Dec 6, 2024 16:50 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 30, 2026 16:25 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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