Product description
Cover for Seriplex generator rack / HDP-CVD Ultima kit context, associated with Applied Materials part number 0040-18157.
Specifications and identifiers
part attributes
| Function | Cover Identified as a cover component. |
|---|
| Subsystem | Seriplex generator rack Product/application attribute. |
|---|
| Kit context | 0242-00060 Seriplex cover kit Associated with the cover in multiple product notes. |
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| Platform clue | HDP-CVD Ultima Included in kit wording. |
|---|
Equipment context
- Applied Materials HDP-CVD Ultima
- Seriplex generator rack
Applications
process chamberspedestal and wafer support areasgas distribution and pumping pathsPVD/CVD chamber kitsrack cover replacementcontrol/power rack protectionHDP-CVD equipment service
How it works
A chamber or process-module hardware component used around the wafer, pedestal, plasma, gas distribution, or chamber body area.
Geometry, material, coating, wafer size, and process family are critical because these parts affect plasma exposure, thermal behavior, contamination control, and mechanical fit.
Technical guide
Vespel
A high-performance polyimide used for selected high-temperature or low-outgassing hardware.
ceramic
Ceramic parts are common in plasma-facing or high-temperature regions because of electrical insulation and process resistance.
quartz
Quartz is used where optical transmission, thermal behavior, or chemical cleanliness is important.
sapphire
Sapphire windows or lenses are used where optical transmission and hardness are needed.
- ESC
- Electrostatic chuck, a wafer-holding assembly that uses electrostatic force.
What to verify before purchase
- Confirm whether the part is standalone cover or part of a kit.
- Verify fit with the specific generator rack configuration.
- Inspect mounting points and hardware.
Confirm with the seller
- Exact kit contents are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.