Product description
Applied Materials source swivel water manifold, H2O source 13 inch context.
Specifications and identifiers
supported details
| Function | Source swivel water manifold Routes cooling/process water to or from a source/swivel area. |
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| Dimension/context | 13 inch referenced Title-derived detail; verify physical dimension. |
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| Revision evidence | Rev E referenced Revision should be checked on the part. |
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Applications
cooling water manifoldssource cooling circuitsprocess chamber utilitiesWater manifold replacementCooling circuit service
How it works
A fluid/water manifold used in vacuum, gas, or fluid handling portions of semiconductor equipment.
Vacuum and gas components affect leak integrity, flow control, contamination control, and safe process operation.
Technical guide
metal
Stainless steel or other process-compatible metals may be used when specified; exact material should be verified.
vacuum_gas_handling
Supports controlled flow or sealed connections in tool subsystems.
- H2O
- Water.
- Manifold
- Block or assembly that distributes fluid among multiple ports.
- NW
- Nominal vacuum flange size used in ISO/KF vacuum hardware.
- SST
- Stainless steel.
- VCR
- A metal-gasket face-seal fitting style common in high-purity gas systems.
What to verify before purchase
- Confirm port size, hose/fitting configuration, and revision.
- Pressure/leak test before installation.
Confirm with the seller
- Exact tool serial compatibility is not confirmed.
- Operating condition and calibration status are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.