Product description
Stainless vacuum tube tee or exhaust transfer-chamber spool with NW40/foreline context.
Specifications and identifiers
vacuum details
| Component | Vacuum tube tee / spool Both tee and spool wording appear with this part. |
|---|
| Material reference | Stainless steel / 316L Supported descriptions include stainless steel and 316L. |
|---|
| Connection context | NW40 flange / foreline / exhaust transfer chamber Port and service context appears in descriptions. |
|---|
Applications
Gas delivery panelsVacuum forelinesSlit-valve/load-lock assembliesLiquid injection systemsVacuum exhaust or foreline plumbingTransfer chamber exhaust spool replacement
How it works
A valve or valve assembly controls gas, vacuum, purge, or process-fluid flow in a tool subsystem.
Valve type, actuation method, seal material, pressure rating, port style, and cleanliness determine whether it can be safely used in a process system.
Technical guide
common
Often stainless steel, aluminum, elastomer seals, and pneumatic or heated actuator components depending on design.
pneumatic actuation
Many semiconductor valves are pneumatically actuated and may include position sensing or heaters.
What to verify before purchase
- Verify exact geometry: tee versus straight spool, NW40 flange arrangement, and revision.
Confirm with the seller
- Exact dimensions and whether it is for foreline or transfer-chamber exhaust should be verified.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.