Product description
Universal lid lift, Rev.007 / EEP-364 context, with 3090-01054 also referenced.
Specifications and identifiers
identification
| Item | Universal lid lift Mechanical lift assembly for a chamber or tool lid. |
|---|
| Revision reference | Rev.007 Revision in multiple descriptions. |
|---|
| Associated reference | 3090-01054 / EEP-364 Associated numbers appear in the item description; verify on the actual assembly. |
|---|
Applications
process chamber hardwarewafer handling assembliesvacuum and gas delivery hardwarechamber lid lifting mechanismmaintenance lift assembly replacement
How it works
A machined or formed mechanical component provides structure, spacing, sealing, shielding, or positioning in a semiconductor process module.
Geometry, material, surface finish, and cleanliness strongly affect fit, particle performance, and process compatibility.
Technical guide
- ID
- Inside diameter.
- OD
- Outside diameter.
- Rev
- Revision; an engineering change level that may affect fit or compatibility.
What to verify before purchase
- Verify mechanical completeness, actuator/motor inclusion, and revision.
- Confirm associated 3090-01054 and EEP-364 markings.
Confirm with the seller
- Exact tool/chamber and actuator details.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.