Product description
Gas box universal lid with alignment holes; P5000 / CVD gas box lid context
Specifications and identifiers
Mechanical identity
| Component | Gas box lid Cover/lid component for a gas box or gas delivery enclosure. |
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| Feature | Alignment holes Alignment-hole wording is repeated in the supported description. |
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| Platform context | P5000 / CVD / DXL context indicated Platform context should be verified against the tool BOM. |
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Equipment context
- Applied Materials Precision 5000 / P5000 CVD
Applications
chamber hardwareprocess kit componentswafer-area shieldingvacuum or gas-box hardwaregas box enclosure hardwareCVD process module gas delivery areareplacement lid or cover for gas box access/alignment
How it works
A gas box lid used as a physical part of a semiconductor processing chamber or module.
Dimensional fit, material, coating, and installed position can affect process uniformity, contamination control, and chamber sealing.
What to verify before purchase
- Confirm hole pattern and lid geometry.
- Verify coating/finish and cleanliness requirements.
- Check whether the exact tool is P5000, DXL, or another CVD configuration.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.