37127 APPLIED MATERIALS BASE COOLING 200MM CATHODE DPS (PARTS) 0040-32190316-0201// AMAT APPLIED 0040-32190 BASE,COOLING,200MM CATHODE,DPS [ASIS]316-0201// AMAT APPLIED 0040-32190 BASE,COOLING,200MM CATHODE,DPS USEDAPPLIED MATERIALS BASE, COOLING, 200MM CATHODE, DPS 0040-32190APPLIED MATERIALS BASE, COOLING, 200MM CATHODE, DPS 0040-32190PN 0040-32190 Applied Material Base Cooling 200mm Cathode DPSPN 0040-32190 Applied Material Base Cooling 200mm Cathode DPSPN 0040-32190 Applied Material Base Cooling 200mm Cathode DPSPN 0040-32190 Applied Material Base Cooling 200mm Cathode DPSPN 0040-32190 Applied Material Base Cooling 200mm Cathode DPS0040-32190 APPLIED MATERIAL BASE, COOLING, 200MM CATHODE, DPS0040-32190 APPLIED MATERIAL BASE, COOLING, 200MM CATHODE, DPS 0040-32190 APPLIED MATERIAL BASE, COOLING, 200MM CATHODE, DPS APPLIED MATERIAL BASE, COOLING, 200MM CATHODE, DPS 0040-32190
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APPLIED MATERIALS 0040-32190

200mm DPS cathode cooling base

Market Availability & Pricing

Part number0040-32190
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales3500 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Cathode Components
200mm DPS cathode cooling base
APPLIED MATERIALS0040-32190Cathode cooling base
Product description
Cooling base for 200mm DPS cathode assembly in Applied Materials equipment.
Specifications and identifiers
identification
Component typeCooling base
Base component associated with thermal management.
Process/module contextDPS cathode
Supported chamber/cathode context.
Wafer size200mm
Supported size context.
Equipment context
  • Applied Materials DPS 200mm chamber context
Applications
DPS etch chambers200mm cathode assembliescooling base replacementCathode coolingDPS chamber thermal management200mm etch chamber hardware service
How it works

A cathode cooling base supports and cools a cathode or electrode-related chamber assembly.

Cooling-base condition affects thermal stability, sealing, and cathode hardware alignment.

Technical guide
DPS

Decoupled Plasma Source context in Applied Materials etch systems.

What to verify before purchase
  • Inspect cooling passages, sealing surfaces, corrosion, and mounting features.
  • Confirm exact DPS chamber variant and cathode assembly compatibility.
Confirm with the seller
  • Exact chamber model/revision is not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

37127 APPLIED MATERIALS BASE COOLING 200MM CATHODE DPS (PARTS) 0040-32190

37127 APPLIED MATERIALS BASE COOLING 200MM CATHODE DPS (PARTS) 0040-32190

USD 1500.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: Apr 21, 2025 04:49 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 11, 2026 16:24 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

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316-0201// AMAT APPLIED 0040-32190 BASE,COOLING,200MM CATHODE,DPS [ASIS]

316-0201// AMAT APPLIED 0040-32190 BASE,COOLING,200MM CATHODE,DPS [ASIS]

USD 3000.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Jul 13, 2022 09:00 UTC
End recorded: Dec 6, 2024 21:55 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 30, 2026 16:11 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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