Product description
LP-liner for cathode mag-ring, waffle-less configuration.
Specifications and identifiers
chamber
| Item form | LP-liner, cathode mag-ring Liner associated with a cathode magnetic ring area. |
|---|
| Configuration | Waffle-less Design descriptor referenced in descriptions. |
|---|
Applications
process chamber maintenancePVD/CVD/etch chamber hardwarewafer-handling or chamber interface assembliesCathode/magnet-ring liner replacementChamber consumable or shield hardware
How it works
A chamber mechanical component is a physical part used in or around a process chamber, wafer handling area, or vacuum hardware.
Dimensional fit, material compatibility, surface condition, and revision can affect process performance, vacuum integrity, and particle control.
What to verify before purchase
- Waffle-less geometry
- Material and coating
- Cathode/chamber generation
Confirm with the seller
- Exact process chamber model
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.