Product description
Dual remote plasma source (RPS) supporter / supporter coupler for Applied Materials equipment.
Specifications and identifiers
identified features
| Component | Dual RPS supporter Repeatedly supported. |
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| Expanded term | Dual Remote Plasma Source supporter/coupler Supported by one rich description. |
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| Configuration | Dual Repeated in the evidence. |
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Applications
process chamberstransfer chambersshielding and containmentwafer support or chamber access hardwareremote plasma source support hardwareRPS mounting or coupling assembly
How it works
A chamber mechanical component is a fitted part used inside or around a process, transfer, or service chamber.
Geometry, material, coating, revision, and chamber position determine fit and compatibility with the process environment.
Technical guide
- RPS
- Remote plasma source, a subsystem used to generate plasma remotely for chamber cleaning or process support.
- Supporter
- Mechanical support or coupler component; exact geometry should be verified.
What to verify before purchase
- Verify exact OEM part number, revision, connector or fitting configuration, and tool compatibility before installation.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.