Product description
Bell jar, 21-inch OD, 300 mm PC XT/XTE; quartz material supported by evidence.
Specifications and identifiers
supported identity
| Function | Bell jar Repeated evidence identifies a bell jar. |
|---|
| Material | Quartz Several sources identify quartz. |
|---|
| Size/platform clue | 21 OD / 300 mm PC XT/XTE Repeated evidence includes these descriptors. |
|---|
Equipment context
- Semiconductor process equipment
Applications
etch chambersCVD chambersPVD chamberswafer clampingprocess shieldingquartz chamber hardware300 mm PC XT/XTE process chamber servicebell-jar replacement
How it works
A wafer-contact or process-facing ring, shield, window, pedestal, clamp, or plate used near the wafer/process area.
Diameter, material, coating, cleanliness, notch orientation, and revision directly affect process fit and contamination risk.
Technical guide
evidence_scope
Only material terms supported by provided evidence should be treated as likely.
typical
quartz, ceramic, alumina, stainless steel, Vespel, aluminum, or process-specific coated metals
CVD
chemical vapor deposition
PVD
physical vapor deposition
- 200mm
- 8-inch wafer-class tooling
- 300mm
- 12-inch wafer-class tooling
What to verify before purchase
- Verify exact OD, mounting geometry, and cleaning/unused status.
- Confirm whether copper-related wording in one source describes included hardware or another assembly.
Confirm with the seller
- Full dimensional drawing.
- Exact chamber version.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.