Product description
Aluminum-oxide coated quartz bell jar, 300 mm
Specifications and identifiers
identification
| Material | Quartz with aluminum oxide coating referenced |
|---|
| Size | 300 mm referenced |
|---|
| Component | Bell jar |
|---|
Applications
Process chambersWafer processing hardwareVacuum chamber servicePreventive maintenance kitsProcess chamber bell jar replacementQuartz chamber component service
How it works
A mechanical process-tool component used for shielding, spacing, sealing, mounting, confinement, or chamber geometry control.
Material, coating, dimensions, process position, and surface condition can affect plasma behavior, contamination risk, and mechanical fit.
Technical guide
- CVD
- Chemical vapor deposition.
- ESC
- Electrostatic chuck.
- QTZ
- Quartz.
- SST
- Stainless steel.
What to verify before purchase
- Coating integrity
- Dimensions and flange/interface
- Cracks, chips, and contamination
Confirm with the seller
- Exact coating specification
- Exact process chamber compatibility
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.