Product description
KSM welded metal bellows / wafer-lift bellows for a 300 mm Applied Materials application, with leak-rate wording present in supported product notes.
Specifications and identifiers
part attributes
| Function | Wafer lift bellows Associated with wafer-lift use. |
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| Size/application | 300 mm Included in multiple product notes. |
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| Vendor/manufacturing clue | KSM KSM identifier appears with the welded bellows. |
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| Leak-rate wording | 1x10-9 cc/sec Specified in several product notes; verify with part markings or test documentation. |
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Equipment context
- Applied Materials 300 mm wafer-lift assembly
Applications
process chamberspedestal and wafer support areasgas distribution and pumping pathsPVD/CVD chamber kitswafer lift motion sealingvacuum bellows replacement300 mm chamber service
How it works
A chamber or process-module hardware component used around the wafer, pedestal, plasma, gas distribution, or chamber body area.
Geometry, material, coating, wafer size, and process family are critical because these parts affect plasma exposure, thermal behavior, contamination control, and mechanical fit.
Technical guide
Vespel
A high-performance polyimide used for selected high-temperature or low-outgassing hardware.
ceramic
Ceramic parts are common in plasma-facing or high-temperature regions because of electrical insulation and process resistance.
quartz
Quartz is used where optical transmission, thermal behavior, or chemical cleanliness is important.
sapphire
Sapphire windows or lenses are used where optical transmission and hardness are needed.
- ESC
- Electrostatic chuck, a wafer-holding assembly that uses electrostatic force.
What to verify before purchase
- Verify leak-rate certification if vacuum integrity is critical.
- Confirm revision and installed stroke/geometry.
- Inspect bellows for dents, fatigue, or weld damage.
Confirm with the seller
- Exact chamber/platform is not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.