AMAT 0040-77085 LOWER PLATEN INCLUDING CHAMBER PLUG, USEDamat mirra lower platen assembly 200mm 0040-77085amat mirra lower platen assembly 200mm 0040-77085amat mirra lower platen assembly 200mm 0040-77085amat mirra lower platen assembly 200mm 0040-77085amat mirra lower platen assembly 200mm 0040-77085amat mirra lower platen assembly 200mm 0040-77085amat mirra lower platen assembly 200mm 0040-77085amat mirra lower platen assembly 200mm 0040-77085amat mirra lower platen assembly 200mm 0040-77085amat mirra lower platen assembly 200mm 0040-77085amat mirra lower platen assembly 200mm 0040-77085amat mirra lower platen assembly 200mm 0040-77085amat mirra lower platen assembly 200mm 0040-77085amat mirra lower platen assembly 200mm 0040-77085amat mirra lower platen assembly 200mm 0040-77085
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Applied Materials 0040-77085

Mirra 200 mm lower platen assembly

Market Availability & Pricing

Part number0040-77085
ManufacturerApplied Materials
Current availabilitySee listings below
Latest completed listing with reported sales8000 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › CMP Components › Platen Assemblies
Mirra 200 mm lower platen assembly
Applied Materials0040-77085lower platen assembly
Product description
Applied Materials 0040-77085 lower platen assembly, 200 mm Mirra context, including chamber plug wording.
Specifications and identifiers
fit notes
Critical fit factorsPlaten surface, chamber plug configuration, mounting features, and CMP tool variant
supported details
Item typeLower platen assembly
Platform/contextMirra
Wafer size200 mm
Included featureChamber plug wording appears in one source
Equipment context
  • Applied Materials Mirra
Applications
CMP tool maintenanceMirra platform servicelower platen replacementCMP lower platen replacementMirra tool mechanical serviceplaten/chamber plug assembly repair
How it works

A platen assembly is a major mechanical component in a CMP tool that supports polishing hardware or chamber-related platen functions.

Platen condition and geometry directly affect CMP mechanical fit and process reliability.

What to verify before purchase
  • 200 mm Mirra configuration
  • Surface condition
  • Chamber plug inclusion
  • Mounting pattern and revision
Confirm with the seller
  • Compatibility with all Mirra variants
  • Polishing/process condition
  • Consumables included

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

AMAT 0040-77085 LOWER PLATEN INCLUDING CHAMBER PLUG, USED

AMAT 0040-77085 LOWER PLATEN INCLUDING CHAMBER PLUG, USED

USD 5000.00

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Jun 18, 2021 13:04 UTC
End recorded: Dec 6, 2024 17:47 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 21, 2026 11:51 UTC

Availability has not been rechecked; current availability is unknown.

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