0040-79200 / CHAMBER UPPER Y203 300MM DPSII / APPLIED MATERIALS AMATAMAT CHAMBER UPPER Y2O3 300MM DPS II 0040-79200 (New)AMAT DPS 300mm CHAMBER UPPER Y2O3 300MM DPSII 0040-792000040-79200 / CHAMBER UPPER Y203 300MM DPSII / APPLIED MATERIALS AMAT0040-79200 / CHAMBER UPPER Y203 300MM DPSII / APPLIED MATERIALS AMAT0040-79200 / CHAMBER UPPER Y203 300MM DPSII / APPLIED MATERIALS AMAT0040-79200 / CHAMBER UPPER Y203 300MM DPSII / APPLIED MATERIALS AMATAMAT DPS 300mm CHAMBER UPPER Y2O3 300MM DPSII 0040-79200 Tag 400482934AMAT Applied Materials DPS 300mm Chamber Upper Y203 0040-79200AMAT Applied Materials DPS 300mm Chamber Upper Y203 0040-79200AMAT Applied Materials 0040-79200 CHAMBER UPPER Y2O3 300MM DPS II - CleanedAMAT Applied Materials 0040-79200 CHAMBER UPPER Y2O3 300MM DPS IIApplied Materials/AMAT CHAMBER UPPER Y2O3 300MM DPSII 0040-79200Applied Materials/AMAT CHAMBER UPPER Y2O3 300MM DPSII 0040-79200Applied Materials/AMAT CHAMBER UPPER Y2O3 300MM DPSII 0040-79200Applied Materials/AMAT CHAMBER UPPER Y2O3 300MM DPSII 0040-79200Applied Materials/AMAT CHAMBER UPPER Y2O3 300MM DPSII 0040-79200Applied Materials/AMAT CHAMBER UPPER Y2O3 300MM DPSII 0040-79200Applied Materials/AMAT CHAMBER UPPER Y2O3 300MM DPSII 0040-79200Applied Materials/AMAT CHAMBER UPPER Y2O3 300MM DPSII 0040-79200 Applied Materials 0040-79200 CHAMBER UPPER Y2O3 300MM DPSII0040-79200 / CHAMBER UPPER Y203 300MM DPSII / APPLIED MATERIALS AMAT
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APPLIED MATERIALS 0040-79200

300mm DPSII Y2O3 Upper Chamber

Market Availability & Pricing

Part number0040-79200
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales17256.2 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Upper Chambers
300mm DPSII Y2O3 Upper Chamber
APPLIED MATERIALS0040-79200upper chamber body
Product description
300 mm DPSII upper chamber with Y2O3/yttria coating context, Applied Materials 0040-79200.
Specifications and identifiers
identification
Primary descriptionChamber upper, Y2O3, 300 mm, DPSII
Coating/material contextY2O3 / yttria
Wafer size300 mm
Platform contextDPS II
Equipment context
  • Applied Materials DPS II
Applications
DPS/DPSII etch chambers300 mm chamber bodiesY2O3-coated chamber hardwareDPSII plasma chamber upper-body replacementYttria-coated chamber hardware for plasma service
How it works

An upper chamber body or assembly forms part of the process chamber structure above the wafer area.

Chamber body geometry, coating, wafer size, and process type are critical for process compatibility and contamination control.

Technical guide
Y2O3

Yttria coating, commonly used for plasma resistance in etch environments.

DPS
Decoupled plasma source platform/context in Applied Materials etch tools.
upper chamber
Upper body section of a process chamber.
What to verify before purchase
  • Confirm coating type and condition, revision, chamber serial compatibility, and whether cleaned/refurbished state is acceptable.
Confirm with the seller
  • Exact revision and complete machine compatibility are not confirmed from the provided evidence alone.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

0040-79200 / CHAMBER UPPER Y203 300MM DPSII / APPLIED MATERIALS AMAT

0040-79200 / CHAMBER UPPER Y203 300MM DPSII / APPLIED MATERIALS AMAT

USD 15703.0900

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Sep 24, 2026 09:43 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 16, 2026 16:25 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

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AMAT CHAMBER UPPER Y2O3 300MM DPS II 0040-79200 (New)

AMAT CHAMBER UPPER Y2O3 300MM DPS II 0040-79200 (New)

USD 26000.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Jan 15, 2025 07:22 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 10, 2026 16:19 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT DPS 300mm CHAMBER UPPER Y2O3 300MM DPSII 0040-79200

AMAT DPS 300mm CHAMBER UPPER Y2O3 300MM DPSII 0040-79200

USD 29761.9000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: NEW
Listed: Feb 28, 2018 01:58 UTC
End recorded: Dec 7, 2024 03:26 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 19, 2026 16:06 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay

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