| Function | Lower liner Lines or shields the lower chamber area. |
|---|---|
| Size/context | 300 mm DPS2 / DPS II DPS2 context is repeated. |
| Condition-dependent part | Liner Inspect for erosion, coating damage, or contamination. |
| Application | Plasma chamber liner Protects chamber surfaces and shapes process environment. |
|---|
A chamber liner is a replaceable or serviceable internal component that shields chamber walls and helps define the process environment.
Material, coating, wear state, and exact chamber fit can affect particle control, plasma behavior, and tool recovery after service.
Ceramic materials provide electrical insulation, heat resistance, or plasma compatibility when specified.
High-purity quartz is commonly used for plasma or optical/process-facing components.
Components near plasma or process gas must be compatible with the chemistry and thermal environment.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.
No public documents were listed for this part when captured.
Prices and availability may change. Confirm details with the seller.
Observed public listing price, not an accepted sale amount.
eBay response captured — Checked Oct 16, 2026 16:20 UTC
Availability has not been rechecked; current availability is unknown.
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eBay response captured — Checked Oct 13, 2026 16:09 UTC
Availability has not been rechecked; current availability is unknown.
Best Offer · Buy It Now
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eBay response captured — Checked Oct 21, 2026 11:36 UTC
Availability has not been rechecked; current availability is unknown.
Best Offer · Buy It Now
View on eBayObserved public listing price, not an accepted sale amount.
eBay response captured — Checked Oct 20, 2026 16:11 UTC
Availability has not been rechecked; current availability is unknown.
Best Offer · Buy It Now
View on eBayObserved public listing price, not an accepted sale amount.
eBay response captured — Checked Oct 17, 2026 16:17 UTC
Availability has not been rechecked; current availability is unknown.
Best Offer · Buy It Now
View on eBay0 matching listings.
No active-status direct listings are shown on this page.
Auction listing history. Direct marketplace listings are shown separately.
| Currency | Price basis | Records | Minimum | Maximum | Mean |
|---|---|---|---|---|---|
| USD | Observed public listing prices | 5 | 1500.0000 | 6500.0000 | 4310.0000000000000000 |
Amounts without an established currency are retained in the history below and excluded from monetary comparisons. Bids, public listing prices and accepted amounts are distinct; no currency conversion is applied.
| Time recorded | Listing | Observation | Public price | Recorded acceptance |
|---|---|---|---|---|
| Mar 8, 2019 18:49 UTC | AMAT 0040-81155 Lower Liner Tetra | Completed listing price | 7500 (currency not captured) | Not established |
| Sep 29, 2018 19:43 UTC | Applied Material Lower Chamber Liner Dps 2. 0040-81155 | Completed listing price | 350 (currency not captured) | Not established |
| Sep 19, 2018 12:03 UTC | Applied Material Lower Chamber Liner Dps 2. 0040-81155 | Completed listing price | 700 (currency not captured) | Not established |
| Sep 18, 2018 01:00 UTC | Applied Material Lower Chamber Liner Dps 2. 0040-81155 | Completed listing price | 350 (currency not captured) | Not established |
| Sep 11, 2018 01:00 UTC | Applied Material Lower Chamber Liner Dps 2. 0040-81155 | Completed listing price | 350 (currency not captured) | Not established |
| Sep 3, 2015 19:12 UTC | Applied Materials AMAT 0040-81155 Tetra Liner Lower DPSII 300MM | Completed listing price | 150 (currency not captured) | Not established |
| Jun 3, 2015 14:35 UTC | Applied Materials AMAT 0040-81155 Tetra Liner Lower DPSII 300MM | Completed listing price | 150 (currency not captured) | Not established |
| May 6, 2015 13:53 UTC | Applied Materials AMAT 0040-81155 Tetra Liner Lower DPSII 300MM | Completed listing price | 300 (currency not captured) | Not established |
| Apr 5, 2015 20:54 UTC | Applied Materials AMAT 0040-81155 Tetra Liner Lower DPSII 300MM | Completed listing price | 500 (currency not captured) | Not established |
| Mar 26, 2015 20:25 UTC | Applied Materials AMAT 0040-81155 Tetra Liner Lower DPSII 300MM | Completed listing price | 1000 (currency not captured) | Not established |
Public listing prices, direct recorded sale prices and recorded accepted Best Offer amounts remain distinct. Quantities are source estimates. No aggregate sales total or average is inferred.
Prices and availability may change. Confirm details with the seller.
Legacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
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Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
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