Product description
Slit valve door for SPD/process 300 mm use, described with Viton process sealing.
Specifications and identifiers
door details
| Component | Slit valve door Door element for a slit valve assembly. |
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| Wafer size context | 300 mm 300 mm appears repeatedly in supported wording. |
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| Seal/process descriptor | Viton process / LLK wording present Seal details require physical verification. |
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Applications
Gas delivery panelsVacuum forelinesSlit-valve/load-lock assembliesLiquid injection systemsLoad-lock or chamber slit-valve sealing300 mm process module door replacement
How it works
A valve or valve assembly controls gas, vacuum, purge, or process-fluid flow in a tool subsystem.
Valve type, actuation method, seal material, pressure rating, port style, and cleanliness determine whether it can be safely used in a process system.
Technical guide
common
Often stainless steel, aluminum, elastomer seals, and pneumatic or heated actuator components depending on design.
pneumatic actuation
Many semiconductor valves are pneumatically actuated and may include position sensing or heaters.
What to verify before purchase
- Verify actual seal material, bonded/sealed condition, orientation, and revision.
Confirm with the seller
- One record mentions 400 mm, so wafer-size/application should be physically verified.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.